RFID Sensor for Organic Deposition Measurement

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Solution Overview

Problem

Quartz crystal microbalance (QCM) sensors used in organic material deposition devices face reliability issues due to temperature increases in vacuum chambers, leading to measurement errors and the need for frequent adjustments, which result in sensing dispersion.

Innovation Solution

An organic material deposition device employing a passive RFID sensor to detect back propagation characteristics, allowing for wireless measurement of organic material deposition amounts through variations in LC resonance frequency, thereby overcoming temperature-related measurement inaccuracies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a QCM sensor is used to sense deposition amount in a vacuum chamber, then deposition measurement is enabled, but temperature increase during deposition causes measurement errors and reduces reliability

Engineering Contradiction:

Improvedeposition amount measurementVSAvoidmeasurement reliability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent replaces the mechanical QCM sensor system with an electromagnetic field-based RFID sensing system. The RFID sensor uses radio frequency electromagnetic fields to detect deposition amount through changes in back propagation characteristics, eliminating the mechanical components that are sensitive to temperature increases in the vacuum chamber.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the measurement parameter from mechanical vibration frequency (QCM) to electromagnetic back propagation characteristics (RFID). By measuring changes in the electromagnetic field's back propagation characteristics rather than mechanical oscillation, the system achieves temperature-insensitive deposition measurement.

Inventive Principle:

Principle #35Parameter changes

2Measurement precision

If QCM sensor is replaced and contact gap is adjusted for fine tuning, then measurement accuracy is improved, but sensing dispersion varies

Engineering Contradiction:

Improvemeasurement accuracyVSAvoidsensing dispersion

Core Design Contradiction:

Measurement precisionVSManufacturing precision

Solution Approach 1:

The RFID sensing system eliminates the mechanical contact gap adjustment requirement by using wireless electromagnetic field interaction. The antenna wirelessly communicates with the RFID sensor without physical contact, removing the source of manufacturing precision variation associated with contact gap adjustments.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The RFID sensor system requires no manual adjustment or calibration by the operator. The wireless electromagnetic field-based measurement automatically adapts to the deposition process without requiring fine-tuning of contact gaps, eliminating human-induced variability in sensing dispersion.

Inventive Principle:

Principle #25Self-service

3Productivity

If organic material is deposited in vacuum chamber, then OLED manufacturing is enabled, but temperature increase deteriorates sensor measurement reliability

Engineering Contradiction:

ImproveOLED manufacturingVSAvoidsensor measurement reliability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent replaces the temperature-sensitive mechanical QCM sensor with a temperature-insensitive electromagnetic RFID sensing system. The RFID sensor's electromagnetic field-based measurement mechanism is not affected by the temperature increases that occur during organic material deposition in the vacuum chamber, maintaining measurement reliability throughout the OLED manufacturing process.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The RFID sensor provides more accurate and reliable measurement of organic material deposition with reduced sensing dispersion, improving the precision of organic light emitting diode (OLED) display manufacturing.

Implementation Method 1

a deposition source (2) mounted in the chamber (1) and configured to vaporize an organic material

Methodology Applied

Scientific EffectVaporization: Evaporation

Implementation Method 2

an antenna (4) mounted in the chamber (1) to receive back propagation from a radio frequency identification (RFID) sensor

Methodology Applied

Scientific EffectElectromagnetic radiation reception: Electromagnetic Induction

Data Source

PatentUS9502478B2Organic matter vapor deposition device and organic light emitting display manufactured thereby

Publication Date: 2016.11.22 SAMSUNG DISPLAY CO LTD

AI summary

An organic material deposition device configured to sense a deposition amount of an organic material deposited in a vacuum chamber by detecting a back propagation characteristic variation of a passive radio frequency identification (RFID) sensor. The organic material deposition device includes: a chamber configured to perform an organic material deposition process therein; a deposition source mounted in the chamber to vaporize an organic material; a deposition mask mounted to face the deposition source and configured to bond a substrate at an opposite side to the deposition source; an antenna mounted in the chamber to receive back propagation from a radio frequency identification (RFID) sensor; and a radio frequency (RF) reader connected to the antenna to measure an organic material deposition amount from a variation of the back propagation.