RFID Tag Cavity in Sputtering Target Backing Plate
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Solution Overview
Problem
Current methods for affixing RFID tags to sputtering targets are costly and time-consuming, involving metal plugs that require precise machining, and do not efficiently maintain signal transmission.
Innovation Solution
An epoxy-based mechanism is used to affix RFID tags to the backing plate of sputtering targets, positioning them in a cavity adjacent to the outer circumference of the backing plate, ensuring proper centering and encapsulation to maintain signal transmission and prevent environmental damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If metal plugs are used to affix RFID tags to sputtering targets, then the RFID tags can be securely attached, but the manufacturing process becomes costly and time-consuming due to precise machining requirements
Solution Approach 1:
The invention extracts the RFID tag attachment function from the complex metal plug machining process and relocates it to a simple cavity in the backing plate. The cavity is formed by machining or molding the backing plate itself, eliminating the need for separate metal plugs and their associated precise machining requirements. This reduces manufacturing complexity while maintaining secure tag attachment.
Solution Approach 2:
The cavity in the backing plate serves as an intermediary structure that facilitates RFID tag attachment. Instead of directly attaching tags to the target or using complex metal plugs, the cavity provides a simple recess that accommodates the tag and allows for secure mounting through adhesive or mechanical means, simplifying the overall attachment process.
2Reliability
If RFID tags are affixed using traditional methods, then they can be attached to the target, but signal transmission may be compromised and environmental damage can occur
Solution Approach 1:
The RFID tag is nested within a cavity in the backing plate, which provides physical protection from environmental factors. The cavity acts as a protective enclosure that shields the tag from moisture, dust, and other environmental hazards while maintaining the necessary signal transmission properties through the backing plate material.
3Quantity of substance
If sputtering targets are used with standard thickness, then they provide sufficient material for sputtering, but the target utilization is low as sputter grooves limit the useful life
Solution Approach 1:
The sputtering target is segmented into two distinct parts: a thin layer of expensive sputterable material bonded to a thicker, less expensive backing plate. This segmentation allows the expensive material to be used only where needed (the sputtering surface), while the backing plate provides structural support and vacuum sealing. The cavity for the RFID tag is formed in the backing plate, further utilizing this segmented structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method provides a low-cost, faster, and efficient way to affix RFID tags to sputtering targets, ensuring reliable signal transmission and extending the useful life of the targets by improving material utilization and reducing the risk of incorrect target usage in PVD machines.
Implementation Method 1
An epoxy is applied to the cavity, with the RFID tag positioned therein. Thereafter, the epoxy is cured to substantially encapsulate the RFID tag.
Implementation Method 2
RFID tags, in general, have been in use since at least the early 1970's... inductively coupled (metal coils in the tag receive power from an electromagnetic field generated by an RFID reader), or capacitively coupled
Data Source
AI summary
A method for affixing an RFID tag to sputtering targets is disclosed. A cavity is formed on the back of the backing plate adjacent to the outer edge. Within the cavity, an RFID tag is secured with an encapsulant. The encapsulant is cured with the RFID tag capable of communicating with an associated reader through the encapsulant.