RFID Tag Temperature Sensing for Semiconductor Support Components
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Solution Overview
Problem
Existing temperature monitoring technologies for semiconductor processing equipment and power distribution systems are costly, cumbersome, and unsuitable for widespread deployment due to the need for expensive sensors, complex wiring, and interference from insulation and high voltage components, limiting the ability to detect hot and cold spots effectively.
Innovation Solution
Utilizing radio frequency identity (RFID) tags with unique serial numbers and resonance frequency detection to monitor the temperature of components, allowing for cost-effective, flexible, and space-efficient temperature monitoring by attaching RFID tags to pipes and power distribution components, with a reader converting resonant frequencies to temperature readings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional electrical temperature sensors (thermocouples) are used to monitor component temperature, then temperature measurement accuracy is improved, but device cost and wiring complexity increase significantly
Solution Approach 1:
The patent replaces traditional electrical temperature sensors (thermocouples, RTDs) that require physical contact and wiring with RFID tags that use electromagnetic field coupling. The RFID tag's resonant frequency changes with temperature, allowing non-contact temperature sensing through electromagnetic resonance detection, thereby eliminating complex wiring and control circuitry while maintaining measurement accuracy
Solution Approach 2:
The patent introduces RFID tags as an intermediary between the temperature field and the detection system. The RFID tag converts temperature information into resonant frequency changes, which are then detected by the reader through electromagnetic coupling. This intermediary approach eliminates the need for direct electrical connection and complex wiring infrastructure
2Reliability
If multiple temperature sensors are deployed along pipes to detect hot and cold spots, then monitoring coverage is improved, but installation cost and complexity increase
Solution Approach 1:
The patent uses multiple identical RFID tags instead of multiple complex electrical temperature sensors. Each RFID tag is a simple, standardized component that can be easily attached to pipes at various locations. The tags are read by a mobile or fixed reader that scans the resonant frequencies of multiple tags, providing comprehensive monitoring coverage at lower installation cost
Solution Approach 2:
The RFID tags serve multiple functions: they act as temperature sensors, provide location identification through their resonant frequency signatures, and can be read remotely. This multi-functionality reduces the need for separate identification and sensing systems, simplifying installation while improving monitoring coverage
3Temperature
If insulation jackets and heating jackets are applied to pipes, then thermal insulation performance is improved, but sensor deployment and wiring become more difficult
Solution Approach 1:
The patent replaces contact-based electrical sensors that require direct access to the pipe surface with RFID tags that use electromagnetic field coupling. The tags can be attached to the external surface of insulated pipes, and temperature is measured through the insulation material by detecting resonant frequency changes in the tag's electromagnetic field, thereby eliminating the need to remove or penetrate insulation jackets
Solution Approach 2:
The RFID tags are designed with flexible mounting capabilities that allow them to be attached to curved pipe surfaces and integrated with insulation jackets. The tags can be positioned on the external surface of insulated pipes without requiring access to the pipe interior or removal of insulation materials
4Area of stationary object
If high voltage power distribution components are relocated to areas with reduced maintenance access, then space efficiency is improved, but fault detection difficulty increases
Solution Approach 1:
The patent replaces traditional electrical temperature sensors that require physical access and wiring to high voltage components with RFID tags that use non-contact electromagnetic field coupling. The tags can be attached to the external surface of power distribution components, and temperature monitoring is achieved by detecting resonant frequency changes in the tag's electromagnetic field, thereby enabling fault detection in hard-to-reach locations without requiring maintenance access
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Provides accurate, cost-effective temperature monitoring of multiple components, enabling early detection of hot and cold spots, reducing downtime and maintenance costs by allowing for widespread deployment and real-time thermal monitoring without the limitations of traditional sensors.
Implementation Method 1
RFID tags have a resonant frequency response dependent on temperature
Data Source
AI summary
There is provided a method of detecting the temperature of a component of a support system for semiconductor processing equipment, the method comprising: applying a radio frequency identity tag to the component, the radio frequency identity tag having a serial number; reading the radio frequency identity tag with a reader, the reader arranged to read the serial number of the radio frequency identity tag, and to identify the resonant frequency of the radio frequency identity tag; and converting the resonant frequency of the radio frequency tag to a temperature of the radio frequency identity tag.