RFID Transponder Component Tracking in Lithography Systems
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Solution Overview
Problem
Lithography systems, such as projection exposure apparatuses for semiconductor lithography, face challenges in tracking and identifying components due to limited information availability from merchandise management systems, especially in clean room or vacuum environments where barcode readability is restricted, and existing solutions like barcodes cannot store or update additional information effectively.
Innovation Solution
Implementing transponders with data memories in components, allowing wireless data storage and retrieval, enabling the storage of detailed information about components and subcomponents, including individualization and customization, without the need for electrical parts or power supply, and allowing data to be updated during production or after system startup.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If barcodes are used for component identification, then information storage is simplified, but readability is restricted in clean room or vacuum environments
Solution Approach 1:
The patent replaces optical barcode reading mechanisms with electromagnetic field-based RFID transponders. The transponders use electromagnetic waves for wireless communication, eliminating the need for optical lines of sight and physical contact, thereby enabling reliable data reading in clean room and vacuum environments where optical barcodes fail.
Solution Approach 2:
The patent introduces an intermediary electromagnetic field as a medium for data transmission between the reader and transponder. This intermediary allows data exchange without direct line-of-sight contact, solving the problem of barcode unreadability in restricted environments by using electromagnetic waves that can penetrate or reflect off surfaces.
2Ease of operation
If merchandise management system numbers are engraved on components, then tracking is enabled, but information content is limited
Solution Approach 1:
The patent transitions from one-dimensional identification (engraved numbers) to multi-dimensional information storage using RFID transponders with data memories. The transponders can store extensive data including production information, individualization details, customization parameters, and component history, dramatically increasing the information capacity beyond what engraved numbers can provide.
Solution Approach 2:
The patent makes the transponder a multi-functional device that serves as both an identification tag and a comprehensive data storage unit. It can store various types of information (production data, individualization details, customization parameters) and communicate wirelessly, replacing multiple separate identification and data storage systems with a single universal device.
3Productivity
If service personnel need to access component information on site, then rapid maintenance is enabled, but data retrieval becomes complicated requiring database connections
Solution Approach 1:
The patent performs preliminary action by pre-storing all necessary component information (production data, individualization details, customization parameters) in the transponder's data memory during manufacturing. This eliminates the need for service personnel to connect to external databases during maintenance, as all required information is already available locally in the transponder.
Solution Approach 2:
The patent enables the transponder to serve itself by containing all necessary identification and information data within its own memory structure. The transponder provides service to maintenance personnel by directly supplying component information through wireless communication, eliminating the need for complex database connections and external data retrieval operations.
4Adaptability or versatility
If components are individually configured, then customer-specific requirements are met, but identification and tracking become more difficult
Solution Approach 1:
The patent applies local quality by storing individualization and customization-specific data in the transponder's data memory. Each transponder contains unique information about its specific configuration, individualization features, and customization parameters, allowing precise identification and tracking of individually configured components without compromising the identification process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and accurate identification and tracking of components, allowing service personnel to access necessary information directly on site, improving maintenance and repair efficiency by storing complex data and allowing data to be read out without a direct line of sight, even in restricted environments.
Implementation Method 1
the transponder is configured to pick up wirelessly arriving signals of a reader
Data Source
AI summary
A method for the tracking and identification of components of lithography systems, for example of projection exposure apparatuses for semiconductor lithography is provided. The components are each provided with at least one transponder. The transponder has a data memory, on which data relating to the respective component are stored. The transponder is configured to pick up wirelessly arriving signals of a reader and to respond with data from the data memory. The data are stored on the data memory during the production of the component and/or during the production of the lithography system and/or after the start-up of the lithography system.