Rhombus Sensor Device Hexagonal Opening Etching Control
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Solution Overview
Problem
Conventional sensor devices, such as microphones, fail to be sufficiently miniaturized due to unoptimized shape and electrode placement, leading to increased size and weight from side etching and dead space in the converter and substrate.
Innovation Solution
A sensor device with a rhombus-shaped converter body and a hexagonal opening, where four sides of the hexagon align with the rhombus, minimizing expansion during etching and reducing dead space through anisotropic wet etching, allowing for efficient miniaturization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a conventional circular or rectangular opening is used in the converter body, then the device structure is simple, but side etching causes the opening to expand horizontally, increasing the converter body size
Solution Approach 1:
The patent applies asymmetry by using a hexagonal opening shape instead of conventional circular or rectangular shapes. The hexagon is specifically oriented with two sides parallel to the etching direction, creating an asymmetric configuration that prevents uniform horizontal expansion during etching. This asymmetric geometry ensures that etching proceeds vertically without significant lateral expansion, thereby minimizing the converter body area while maintaining manufacturing simplicity.
2Ease of manufacture
If conventional electrode placement is used, then electrode formation is straightforward, but dead space is created around the opening, increasing the overall device size
Solution Approach 1:
The patent applies dimensionality change by transitioning from conventional planar electrode placement to a three-dimensional configuration where electrodes are arranged on multiple surfaces of the rhombus-shaped converter body. The converter electrodes are formed on the side surfaces and top surface, utilizing the vertical dimension to eliminate dead space. This multi-surface electrode arrangement allows electrical connections without requiring additional horizontal space, thereby reducing the overall device occupation area while maintaining ease of electrode formation.
3Area of stationary object
If the converter body size is reduced for miniaturization, then the sensor device becomes smaller and lighter, but space for electrode formation and electrical connections becomes insufficient
Solution Approach 1:
The patent applies merging by integrating the electrode formation process with the converter body structure itself. The converter electrodes are formed directly on the side surfaces and top surface of the rhombus-shaped converter body, merging the structural and electrical functions into a single integrated component. This integration eliminates the need for separate electrode mounting spaces, allowing miniaturization of the sensor device while maintaining sufficient space for electrode formation and electrical connections through the vertical utilization of the converter body surfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor device achieves significant miniaturization by minimizing dead space and maintaining efficient electrical connections, enabling smaller and lighter designs for portable electronic equipment.
Implementation Method 1
minimizing expansion during etching and reducing dead space through anisotropic wet etching
Data Source
AI summary
The sensor device includes: a converter body made of silicon in the shape of a rhombus in plan, the converter body having an opening in the shape of a hexagon in plan; a substrate for holding the converter body; a movable film formed on the opening; a converter electrode formed on the converter body; and a substrate electrode formed on the substrate, the substrate electrode being electrically connected with the converter electrode. The opening is placed so that four of the six sides of the hexagon extend along the four sides of the rhombus of the converter body.