Ribbed Semiconductor Package Lid for CTE Stress and Delamination

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Solution Overview

Problem

The coefficient of thermal expansion (CTE) mismatch between materials used in semiconductor devices, such as silicon, substrates, and lids, leads to thermal stress, die crack, and delamination issues, affecting the thermal performance and mechanical stability of semiconductor packages.

Innovation Solution

The implementation of rib portions protruding from the lid structure towards the package structure to improve warpage and reduce delamination, combined with a thermal interface layer and a lid structure comprising a cover portion, ring portion, and rib portions to enhance mechanical strength and thermal conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If materials with different coefficients of thermal expansion are used in semiconductor devices, then functional performance is improved, but thermal stress and delamination occur

Engineering Contradiction:
Improvematerial selection flexibilityVSAvoidthermal stress resistance
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent introduces a gradient structure where the coefficient of thermal expansion changes gradually from the substrate through intermediate layers to the lid. This gradient CTE design allows materials with different thermal expansion properties to be used while reducing thermal stress by avoiding abrupt transitions, thus resolving the contradiction between material selection flexibility and thermal stress resistance.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures with multiple layers having different thermal expansion coefficients, arranged in a gradient configuration. This composite approach enables the use of diverse materials for functional performance while the gradual transition between layers prevents delamination and reduces thermal stress.

Inventive Principle:
Principle #40Composite materials

2Strength

If a lid structure is added to improve mechanical strength, then structural integrity is enhanced, but warpage and delamination increase due to CTE mismatch

Engineering Contradiction:
Improvemechanical strengthVSAvoidwarpage resistance
Core Design Contradiction:
StrengthVSStability of the object's composition

Solution Approach 1:

The lid structure incorporates a gradient coefficient of thermal expansion across its thickness, transitioning from matching the substrate CTE at the bottom to matching the package contents CTE at the top. This parameter gradient allows the lid to provide mechanical strength while accommodating thermal expansion differences, preventing warpage and delamination.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent addresses the CTE mismatch problem by introducing a dimensional gradient within the lid structure itself, rather than trying to match materials perfectly. The CTE varies through the thickness dimension of the lid, allowing it to bridge the thermal expansion gap between substrate and package contents while maintaining structural integrity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Temperature

If thermal interface layers are added to improve heat dissipation, then thermal performance is enhanced, but manufacturing complexity increases

Engineering Contradiction:
Improveheat dissipation efficiencyVSAvoidmanufacturing complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent combines the thermal interface layer function with the lid structure itself, creating an integrated component that provides both structural support and thermal management. This merging reduces manufacturing complexity by eliminating separate assembly steps while maintaining effective heat dissipation through the gradient CTE design.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces thermal stress and delamination, improves mechanical reliability, and enhances thermal performance by efficiently dissipating heat while maintaining structural integrity.

Implementation Method 1

a thermal interface layer and a lid structure comprising a cover portion, ring portion, and rib portions to enhance mechanical strength and thermal conductivity

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

The coefficient of thermal expansion (CTE) mismatch between materials used in semiconductor devices, such as silicon, substrates, and lids, leads to thermal stress, die crack, and delamination issues

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS20250309009A1Semiconductor package
Publication Date: 2025.10.02 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250309009A1 patent drawing
  • US20250309009A1 patent drawing
  • US20250309009A1 patent drawing

AI summary

A semiconductor package includes a substrate, a package structure, and a lid structure. The package structure is disposed on the substrate. The lid structure is disposed over substrate, wherein the lid structure includes a main body covering and surrounding the package structure and a plurality of rib portions protruded from the main body and extended toward the package structure.