Non-Parallel Member Pairs for Ribbon Beam Current Density Control

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Solution Overview

Problem

Existing beam current density distribution adjustment devices using electric or magnetic fields face challenges in uniformly adjusting the beam current density along the long side direction of a ribbon beam, particularly at the ends, due to localized electric or magnetic field variations causing wavy distributions and difficulty in precise control.

Innovation Solution

The proposed solution involves a beam current density distribution adjustment device with member pairs disposed along the long side direction of the ribbon beam, where opposing surfaces of the member pairs are not parallel to the traveling direction, thereby altering the position of local electric or magnetic field influence, averaging and reducing its impact, allowing for more precise control of the beam current density distribution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If parallel opposing surfaces are used in member pairs, then the device structure is simple, but the beam current density distribution cannot be uniformly adjusted at the ends of the ribbon beam

Engineering Contradiction:

Improvebeam current density distribution uniformityVSAvoidmember pair surface configuration

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The opposing surfaces of the member pairs are configured to be non-parallel, with at least a portion of each surface having a different angle relative to the traveling direction of the ribbon beam. This asymmetric configuration alters the position where local electric or magnetic field variations act on the beam, preventing concentrated wavy distributions at the beam ends and achieving more uniform current density adjustment.

Inventive Principle:

Principle #4Asymmetry

2Manufacturing precision

If voltages or currents are adjusted to locally deflect beam components, then beam current density distribution can be controlled, but wavy distributions occur at the beam ends due to localized field variations

Engineering Contradiction:

Improvebeam current density distribution controlVSAvoidbeam current density uniformity

Core Design Contradiction:

Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

By making the opposing surfaces non-parallel, the invention changes the spatial distribution of the electric or magnetic field variations. This prevents the localized field variations from acting on the same position of the ribbon beam throughout its length, thereby eliminating the wavy distribution pattern that occurs with parallel surfaces and achieving stable, uniform current density control.

Inventive Principle:

Principle #4Asymmetry

Solution Approach 2:

The invention introduces angular variation in the surface orientation as an additional degree of freedom. Instead of only adjusting voltages or currents along a single dimension, the non-parallel surface configuration adds a geometric dimension to the field distribution control, allowing the local field variations to act on different positions along the beam length and thus smooth out wavy distributions.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Ease of operation

If multiple electrode pairs or magnetic pole pairs are disposed along the long side direction, then local beam deflection is possible, but precise control at the beam ends remains difficult

Engineering Contradiction:

Improvebeam deflection controlVSAvoidbeam current density distribution precision

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The non-parallel surface configuration of the member pairs creates asymmetric field distributions that naturally address the beam ends differently from the center. This geometric asymmetry, combined with voltage or current adjustments, enables precise control of beam deflection and current density distribution at the beam ends, overcoming the limitation of parallel surface configurations.

Inventive Principle:

Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables easier adjustment of the beam current density distribution at the ends of the ribbon beam, reducing wavy distributions and improving control, leading to more uniform and predictable beam deflection and implantation processes.

Implementation Method 1

a plurality of member pairs in a long side direction of a ribbon beam, the member pairs adjusting a beam current density distribution in the long side direction of the ribbon beam by using an electric field or a magnetic field

Methodology Applied

Scientific EffectElectric field: Electric Field

Implementation Method 2

Methodology Applied

Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS9734982B1Beam current density distribution adjustment device and ion implanter

Publication Date: 2017.08.15 NISSIN ION EQUIPMENT CO LTD

AI summary

A beam current density distribution adjustment device is provided. The device includes member pairs in a long side direction of a ribbon beam, the member pairs adjusting a beam current density distribution in the long side direction of the ribbon beam by using an electric field or a magnetic field, members of each of the member pairs being disposed with the ribbon beam in-between the members. Opposing surfaces of the member pairs adjacent to each other in the long side direction of the ribbon beam are partially not parallel to a traveling direction of the ribbon beam.