Ribbon Inductor Machining for High-Current Thermal Control
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Solution Overview
Problem
Inductors in matching networks for high power frequency generators used in semiconductor processing become excessively hot due to high current loads, leading to heat damage and performance issues.
Innovation Solution
A high current inductor is formed by machining a solid core conductive material to create a ribbon conductor with controlled gap spacing and insert, allowing for high thermal conductivity and coolant flow, enabling operation with high current and power while maintaining low inductance variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If traditional inductor design is used in high power frequency generators, then the inductor can provide necessary inductance, but the inductor becomes excessively hot due to high current loads causing heat damage
Solution Approach 1:
The inductor is segmented into multiple parallel ribbon conductors instead of using a single solid conductor. This segmentation increases the total surface area for heat dissipation while maintaining the required inductance, allowing the inductor to handle high power without excessive temperature rise.
Solution Approach 2:
Different regions of the inductor are designed with different properties - the ribbon conductors provide electrical conductivity and inductance, while the spacing between ribbons provides thermal management. The local geometry of each ribbon (width, thickness, spacing) is optimized to balance electrical performance and thermal dissipation in high current applications.
2Power
If the inductor is designed to handle high current loads, then power handling capability increases, but heat generation increases causing damage to surrounding materials
Solution Approach 1:
The heat generated by high current flow is converted from a harmful effect into a manageable parameter through the ribbon conductor design. The increased surface area of the ribbons transforms the harmful heat concentration into beneficial heat dissipation, allowing the inductor to operate at high currents without damaging surrounding materials.
Solution Approach 2:
The conductor geometry transitions from a traditional circular wire cross-section to a flat ribbon cross-section. This dimensional change dramatically increases the surface area-to-volume ratio, providing enhanced thermal dissipation pathways in the radial direction while maintaining the electrical conductivity needed for high current handling.
3Power
If the inductor operates at high power, then the matching network performance improves, but inductance variations increase reducing stability
Solution Approach 1:
The inductor geometry is pre-designed and precisely manufactured to account for thermal expansion and electromagnetic effects that occur during high power operation. The ribbon spacing, width, and length are predetermined to maintain stable inductance values even when the inductor operates at elevated temperatures and high currents.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides an inductor capable of handling high current and power with reduced heat generation, ensuring stable performance and tight inductance tolerances, enhancing the efficiency and reliability of RF impedance matching networks in semiconductor processing.
Implementation Method 1
the insert is configured to extract heat from the high current inductor to an inner surface of the insert that is configured to allow coolant to flow across the inner surfaces
Implementation Method 2
the inductor in the match network becomes very hot when subjected to high current loads causing heat/melting damage to surrounding materials
Data Source
AI summary
Methods for forming a high current inductor leverage solid core materials to form ribbon inductors. In some embodiments, the method may include forming a central opening lengthwise through a solid core conductive material, wherein the solid core conductive material has an outer diameter, the central opening forms an inner diameter of the solid core conductive material, and a difference between the outer diameter and the inner diameter is a thickness of a ribbon conductor of the high current inductor and removing a spiral portion of the solid core conductive material to form the ribbon conductor of the high current inductor, wherein a width of the spiral portion forms a gap spacing between windings of the ribbon conductor.