Ring Assembly Arcing Test Chamber for Substrate Processing
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Solution Overview
Problem
The challenge is to develop a ring assembly test apparatus for a substrate processing apparatus that can effectively test for the occurrence of arcing in the ring assembly, ensuring that it meets conditions that prevent arcing during substrate processing.
Innovation Solution
The proposed solution involves a ring assembly test apparatus comprising an electrode body with a bottom and top electrode, a power application module for applying high voltage alternating current, and an arc detector to identify arcing occurrences. This apparatus simulates the plasma etching environment outside the substrate processing apparatus, allowing for the testing of ring assemblies under conditions that could lead to arcing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the ring assembly is tested inside the substrate processing apparatus, then the testing can be performed in the actual operating environment, but the testing process becomes complex and time-consuming requiring full apparatus assembly and disassembly
Solution Approach 1:
The patent extracts the ring assembly from the substrate processing apparatus to perform testing in a separate, dedicated test chamber. The ring assembly is removed from its installed position and placed in the test chamber where it can be tested independently without requiring the entire substrate processing apparatus to be assembled or disassembled, thereby simplifying the testing process while maintaining testing accuracy
Solution Approach 2:
The patent creates a simplified test chamber that replicates the essential plasma generation and arcing detection capabilities of the full substrate processing apparatus. By copying only the necessary functional elements (power application module, arc detector, vacuum chamber) rather than the entire apparatus, the system achieves accurate arcing testing without the complexity of handling the complete substrate processing equipment
2Reliability
If the ring assembly is tested after apparatus assembly, then the actual operating conditions can be evaluated, but production time is increased due to assembly and disassembly requirements
Solution Approach 1:
The patent enables preliminary testing of the ring assembly in the test chamber before the ring assembly is installed into the substrate processing apparatus. By performing the arcing test in advance on the extracted ring assembly, the system identifies potential arcing issues before final assembly, eliminating the need for time-consuming assembly and disassembly cycles while maintaining the ability to evaluate operating conditions
Solution Approach 2:
The patent segments the testing process from the apparatus assembly process by creating an independent test chamber that can operate separately. This segmentation allows the ring assembly to be tested in isolation without requiring the substrate processing apparatus to be fully assembled, thereby reducing the time loss associated with assembly and disassembly while maintaining testing reliability
3Measurement precision
If high voltage power is applied to test for arcing, then arcing occurrence can be detected, but safety risks and equipment damage potential increase
Solution Approach 1:
The patent introduces the test chamber as an intermediary environment between the power application module and the ring assembly. The chamber provides controlled conditions with proper insulation, grounding, and containment features that mediate the high voltage application process, enabling precise arc detection while mitigating safety hazards through engineered protection barriers and controlled atmospheric conditions
Solution Approach 2:
The patent converts the potentially harmful high voltage arcing phenomenon into a beneficial diagnostic tool by carefully controlling the test conditions. The arc detector monitors arcing events that occur during controlled high voltage application, transforming what would be a dangerous uncontrolled arc into a measurable, informative signal that identifies ring assembly defects without causing equipment damage when proper test parameters are used
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables pre-emptive testing of ring assemblies for arcing, ensuring that they meet design conditions to prevent arcing during substrate processing. This approach simplifies the design and manufacturing process by identifying and addressing potential arcing issues before they occur in the substrate processing apparatus.
Implementation Method 1
a power application module for applying power to the electrode body, wherein power is applied to the electrode body to test an occurrence of arcing
Implementation Method 2
an arc detector provided between the electrode body and the power application module and for detecting an occurrence of arcing
Data Source
AI summary
A ring assembly test apparatus for a substrate processing apparatus of the present invention comprises an electrode body including a bottom electrode disposed below a test object including a ring assembly and a top electrode disposed above the test object, and a power application module for applying power to the electrode body, wherein power is applied to the electrode body to test an occurrence of arcing of the ring assembly outside the substrate processing apparatus that processes a substrate.