Ring Resonator Bolometer Waveguide Integration

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Solution Overview

Problem

Conventional bolometers suffer from low efficiency, high power consumption, limited sensitivity, and slow response times due to their design for free-space optics applications, which restricts their performance in detecting electromagnetic radiation.

Innovation Solution

A bolometer design incorporating a ring resonator structure with a silicon oxide layer in thermal contact, coupled with first and second waveguides to enhance infrared light absorption and temperature measurement, allowing for efficient infrared light detection and faster response times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional bolometer design for free-space optics applications is used, then the structure is simple, but the efficiency is low and power consumption is high

Engineering Contradiction:
ImproveefficiencyVSAvoidstructure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent transitions from free-space optics to integrated photonics by confining infrared light propagation to a waveguide dimension. The ring resonator is fabricated on a chip substrate with waveguides, transforming the detection geometry from three-dimensional free-space to two-dimensional planar integration, thereby improving efficiency while maintaining manageable complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where the ring resonator is coupled to waveguides that are themselves integrated on the chip substrate. The silicon oxide layer is nested within the waveguide structure, creating a compact multi-layer configuration that enhances light-matter interaction efficiency without proportionally increasing overall device complexity

Inventive Principle:
Principle #7Nested doll (Nesting)

2Speed

If conventional bolometer design is used, then manufacturing is simpler, but response speed is slow (milliseconds range)

Engineering Contradiction:
Improveresponse speedVSAvoidmanufacturing ease
Core Design Contradiction:
SpeedVSEase of manufacture

Solution Approach 1:

The patent changes the thermal parameters by using a silicon oxide layer with specific thermal properties and configuring the ring resonator geometry to optimize heat confinement. The thermal time constant is reduced by modifying the mass and heat capacity parameters of the absorbing structure, enabling faster response while using standard semiconductor fabrication processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs thin film structures for the waveguides and ring resonator fabricated using standard semiconductor processes. The thin silicon oxide layer acts as both the absorbing medium and thermal management element, providing flexible thermal coupling that enhances response speed while maintaining compatibility with existing manufacturing techniques

Inventive Principle:
Principle #30Flexible shells and thin films

3Measurement precision

If conventional bolometer design is used, then the structure is straightforward, but sensitivity is limited by low temperature coefficient of resistance

Engineering Contradiction:
ImprovesensitivityVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the electrical resistance measurement mechanism with an optical detection mechanism. Instead of measuring temperature through resistance changes in a sensing resistor, the system uses a probe laser to detect temperature-induced refractive index changes in the ring resonator, providing higher sensitivity without requiring materials with high temperature coefficients of resistance

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The ring resonator structure serves multiple functions: it acts as the infrared absorbing element, the temperature sensing element, and the signal transduction element. This multi-functionality enhances sensitivity by using the same structure for both energy absorption and temperature measurement, eliminating the need for separate sensing components

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Loss of energy

If conventional bolometer design is used, then fewer components are needed, but radiant energy conversion to heat energy is low

Engineering Contradiction:
Improveradiant energy conversion efficiencyVSAvoidstructure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent uses optical resonance in the ring resonator to enhance energy absorption. By tuning the resonator to resonate at the infrared wavelength, the system achieves strong light-matter interaction that dramatically increases radiant energy conversion efficiency, analogous to mechanical resonance enhancing vibrational energy absorption

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The patent employs a composite structure combining silicon waveguides with silicon oxide absorbing layer. The silicon provides low-loss infrared transmission while the silicon oxide provides strong infrared absorption through phonon resonance, creating a composite system with enhanced overall absorption efficiency that leverages the complementary properties of both materials

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed design achieves higher efficiency, lower power consumption, and faster response speeds compared to conventional bolometers, with enhanced sensitivity and absorption efficiency, making it suitable for mid-infrared detection applications.

Implementation Method 1

the first waveguide configured to couple an infrared light to the ring resonator structure so that the infrared light generates a temperature increase in the silicon oxide layer

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

an infrared (IR) absorbing layer 104, the sensing resistor 102 in thermal connection with layer 104

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 3

a silicon oxide layer in thermal contact with the ring resonator structure

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 4

the second waveguide configured to couple a probe light input to the ring resonator structure so that a probe light output is generated from the probe light input, the probe light output having a change in a characteristic from the probe light input based on the temperature increase

Methodology Applied
Scientific EffectThermo-optic effect: Electro-Optic Effects

Implementation Method 5

The change in resistance, ΔR, is provided by ΔR/R0 = αΔT where R0 is the initial resistance, ΔT is the change in temperature, and α is the temperature coefficient of resistance

Methodology Applied
Scientific EffectTemperature coefficient of resistance: Thermo-resistive Effect

Data Source

PatentUS10151638B2Bolometer, method of fabricating the same, and bolometric method
Publication Date: 2018.12.11 AGENCY FOR SCI TECH & RES
  • US10151638B2 patent drawing
  • US10151638B2 patent drawing
  • US10151638B2 patent drawing

AI summary

Various aspects of this disclosure provide a bolometer including a substrate and a ring resonator structure over the substrate. The bolometer may also include a silicon oxide layer in thermal contact with the ring resonator structure. The bolometer may further include a first waveguide over the substrate and coupled to the ring resonator structure, the first waveguide configured to couple an infrared light to the ring resonator structure so that the infrared light generates a temperature increase in the silicon oxide layer. The bolometer may additionally include a second waveguide over the substrate and coupled to the ring resonator structure, the second waveguide configured to couple a probe light input to the ring resonator structure so that a probe light output is generated from the probe light input, the probe light output having a change in a characteristic from the probe light input based on the temperature increase.