Ring-Segment Light Beam Conversion to Homogeneous Line Focus

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Solution Overview

Problem

Existing methods for converting light beams to line focuses often result in non-homogeneous intensity distribution along the focus length, requiring costly or difficult-to-produce optical components and leading to intensity losses due to masking of beam portions.

Innovation Solution

A method and optical device that utilize a light beam with a ring-segment-shaped cross section, directed onto conical or spherical optically operative surfaces, ensuring a consistent numerical aperture and avoiding masking, thus achieving a homogeneous line focus without the need for complex components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional optical components (cylindrical lenses, mirrors) are used to convert light beams to line focuses, then the conversion can be achieved, but the intensity distribution along the focus length becomes non-homogeneous and costly components are required

Engineering Contradiction:
Improveintensity distribution homogeneityVSAvoidoptical component complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent changes the parameter of the light beam cross-section shape from conventional circular or rectangular to ring-segment shaped. This parameter change enables the beam to be focused into a line focus with homogeneous intensity distribution using simpler optical surfaces, resolving the contradiction between intensity homogeneity and device complexity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs spherical or cylindrical optically operative surfaces instead of complex aspherical or freeform surfaces. By directing the ring-segment shaped beam onto these simpler curved surfaces, the patent achieves homogeneous line focus while avoiding the need for costly, difficult-to-produce optical components

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Manufacturing precision

If masking is applied to portions of the light beam to achieve homogeneous intensity, then intensity distribution can be controlled, but intensity losses occur due to blocked beam portions

Engineering Contradiction:
Improveintensity distribution homogeneityVSAvoidlight intensity loss
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The patent applies preliminary action by pre-shaping the light beam into a ring-segment cross-section before it enters the optical system. This pre-shaping eliminates the need for subsequent masking operations, allowing the entire beam to be utilized and preventing energy loss while achieving homogeneous intensity distribution in the line focus

Inventive Principle:
Principle #10Preliminary action

3Reliability

If conventional optical components are used, then beam conversion can be achieved, but diffraction effects increase and reduce focus quality

Engineering Contradiction:
Improvefocus qualityVSAvoiddiffraction effects
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the numerical aperture parameter by utilizing the ring-segment shaped beam configuration, which maintains a consistent numerical aperture across the beam profile. This parameter optimization reduces diffraction effects and improves focus quality, eliminating the harmful diffraction effects associated with conventional beam shapes and optical components

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method generates a line focus with high homogeneity along its length, minimizing diffraction effects and intensity losses, using simpler and more cost-effective optical surfaces like spherical and cylindrical surfaces.

Implementation Method 1

a light beam is directed onto at least one conical, optically operative surface, by which it is converted to the line focus

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

using simpler and more cost-effective optical surfaces like spherical and cylindrical surfaces

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 3

directed onto conical or spherical optically operative surfaces

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS9042032B2Optical arrangement for converting an incident light beam, method for converting a light beam to a line focus, and optical device therefor
Publication Date: 2015.05.26 CARL ZEISS SMT GMBH
  • US9042032B2 patent drawing
  • US9042032B2 patent drawing
  • US9042032B2 patent drawing

AI summary

In a method for converting a light beam to a line focus, wherein the line focus extends according to its length along a first direction (y) and is narrow in a second direction (x) perpendicular to the first direction (y), the light beam is directed onto at least one conical optically operative surface, by which it is converted to the line focus. The light beam is directed onto the at least one optically operative surface with a ring-segment-shaped cross section transversely with respect to the light propagation direction. A device, in particular for carrying out the method, and an optical arrangement for generating a light beam with a ring-segment-shaped cross section are likewise described. In accordance with a further method and a further device, a line focus is generated only with spherical and/or cylindrical elements.