Ring X-ray Detector for TEM Solid Angle

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Solution Overview

Problem

Existing x-ray detectors in transmission electron microscopes face challenges in achieving high detection efficiency due to ice formation, contamination, and limited solid angle coverage, which reduces their ability to detect x-rays effectively, especially at high energy and varying sample tilt angles.

Innovation Solution

The use of multiple semiconductor detectors arranged in a ring configuration within the specimen chamber, equipped with a shutter and a cold shield to prevent ice formation, and positioned to cover a large solid angle around the sample, allowing detection from various directions and maintaining alignment with the sample despite temperature changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single detector is used in transmission electron microscope, then the device complexity is low, but the solid angle coverage is limited and detection efficiency is reduced

Engineering Contradiction:
Improvedetection efficiencyVSAvoiddetector configuration
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The detector is divided into multiple semiconductor detector elements arranged in a ring configuration, where each element independently detects x-rays from different angular positions. This segmentation increases the total solid angle coverage while maintaining manageable individual element complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The detector elements are arranged in a ring geometry around the optical axis, transitioning from a single-point detection to a distributed circular array. This dimensional arrangement maximizes solid angle coverage in the azimuthal direction without significantly increasing radial complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Object-affected harmful factors

If the detector is cooled to reduce ice formation, then ice formation is reduced, but the detector requires additional temperature control mechanisms

Engineering Contradiction:
Improveice formationVSAvoidtemperature control system
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The detector operating temperature is changed from ambient to cryogenic temperatures (e.g., liquid nitrogen temperature), fundamentally altering the thermal state to prevent ice formation on the detector surface and in the beam path

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

A cold shield or cold trap is introduced as an intermediary component between the sample and detector, positioned to intercept water vapor and prevent it from condensing on the detector. This mediator handles the harmful condensation function, protecting the detector while allowing it to operate at optimal temperature

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If the detector is placed closer to the sample to increase solid angle, then the solid angle coverage is improved, but the space is constrained by pole pieces and sample holder

Engineering Contradiction:
Improvesolid angle coverageVSAvoidavailable space
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

Instead of placing the detector directly adjacent to the sample in the limited radial space, the detector elements are arranged in a ring at a larger radius from the optical axis. This angular/dimensional arrangement captures x-rays from multiple azimuthal positions simultaneously, achieving high solid angle coverage despite radial space constraints

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The detection function is segmented across multiple detector elements positioned at different angular locations around the ring. Each element captures x-rays from its specific angular sector, and the combined coverage of all segments achieves comprehensive solid angle detection

Inventive Principle:
Principle #1Segmentation

4Productivity

If multiple detectors are arranged in a ring to increase solid angle, then detection efficiency is improved, but the device complexity increases

Engineering Contradiction:
Improvex-ray count rateVSAvoiddetector array configuration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Multiple semiconductor detector elements are merged into a single ring-shaped detector assembly that functions as one integrated detection system. The elements share common support structures, cooling systems, and signal processing electronics, reducing the overall complexity compared to independent detector units

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The ring-shaped detector array serves multiple functions simultaneously: it provides high solid angle coverage for quantitative analysis, enables tomographic imaging through angular distribution information, and maintains compatibility with standard TEM sample holders and pole piece configurations

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances detection efficiency by reducing ice formation, increasing the solid angle of collection, and enabling accurate detection at any sample tilt, leading to improved x-ray count rates and the capability for 3D tomography without requiring multiple tilt images.

Implementation Method 1

moisture sublimes from the detector surface onto the collimator surface

Methodology Applied
Scientific EffectSublimation: Sublimation

Implementation Method 2

detectors that measure the energy of incoming x-rays are referred to as energy dispersive spectrometers (EDS)

Methodology Applied
Scientific EffectEnergy dispersive detection: Photoelectric Effect

Data Source

PatentEP2197019B1X-ray detector for transmission electron microscope
Publication Date: 2016.03.23 FEI CO
  • EP2197019B1 patent drawingFigure 1
  • EP2197019B1 patent drawingFigure 2
  • EP2197019B1 patent drawingFigure 3

AI summary

Multiple detectors (202) arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors (202) preferably include a shutter (108) and a cold shield (110) that reduce ice formation on the detector (202). By providing detectors (202) surrounding the sample (204), a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample (204) tilt.