Rinsable Primer for Semiconductor Substrate Cleaning
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Solution Overview
Problem
Conventional cleaning processes fail to effectively remove residual impurities and crosslinked functional coatings from substrates, leading to incomplete cleaning and potential irregularities in subsequent manufacturing processes, especially when using rubber-based polymers and reactive substrates.
Innovation Solution
A composition of a rinsable primer is applied and cured as a thin coating, comprising components that exhibit a sufficient polarity difference from the temporary functional coating, along with surface active agents, to minimize mixing and facilitate efficient removal through conventional cleaning processes, ensuring an ultraclean substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a temporary functional coating is applied to protect or mask the substrate during manufacturing, then the substrate is protected or masked effectively, but residual impurities and crosslinked coating remain on the substrate after cleaning
Solution Approach 1:
The system is segmented into three distinct layers: the substrate, the temporary functional coating, and the rinsable primer. The primer acts as a separate intermediate layer that prevents the coating from directly contacting and bonding to the substrate, enabling clean separation and removal of the coating without leaving residues on the substrate.
Solution Approach 2:
The rinsable primer serves as an intermediary layer between the temporary functional coating and the substrate. It mediates the interaction by providing a release surface that prevents permanent bonding, allowing the coating to be removed cleanly after serving its protective or masking function.
2Productivity
If conventional cleaning processes are used to remove the temporary coating, then the coating is removed, but residual impurities remain that cause irregularities in subsequent manufacturing
Solution Approach 1:
The rinsable primer is applied and cured on the substrate before the temporary functional coating is applied. This preliminary action creates a pre-prepared release surface that ensures clean removal of the coating later, preventing residue formation before the cleaning process even begins.
Solution Approach 2:
The primer's polarity is specifically designed to differ from both the substrate and the temporary coating. This parameter change in surface energy and chemical composition allows the primer to act as a release layer that facilitates clean separation and removal of the coating without leaving residues.
3Ease of manufacture
If the primer polarity is similar to the coating polarity, then the primer and coating mix during application, but this mixing prevents effective cleaning and removal
Solution Approach 1:
Each layer in the system is given a distinct local quality in terms of polarity and surface energy. The substrate, primer, and temporary coating each have different polar characteristics, ensuring that the primer remains chemically distinct from both the substrate and the coating, preventing unwanted mixing while maintaining proper adhesion and release properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high cleanliness by preventing intermixing between the primer and coating, allowing for effective removal of residual impurities and crosslinked coatings, thereby improving the quality of subsequent processing steps.
Implementation Method 1
components that exhibit a sufficient polarity difference from the temporary functional coating, along with surface active agents, to minimize mixing
Implementation Method 2
along with surface active agents, to minimize mixing and facilitate efficient removal through conventional cleaning processes
Data Source
AI summary
Compositions and methods that use rinsable primers for the removal of temporary functional coatings from substrates, for example, electronic devices, are provided. Methods are provided which discuss the use of rinsable primers to aid the removal of temporary functional coatings that include photoresist, dielectrics, adhesives, and other related materials used in temporary manufacturing applications. These compositions and methods are particularly suitable for removing temporary adhesives used in the manufacture of semiconductors and flat panel displays.