Rinse Module Gas Entrainment Prevents Plating Solution Dilution
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional plating apparatuses allow a large amount of rinse solution to enter the plating tank, leading to excessive dilution of the plating solution.
Innovation Solution
A plating apparatus with a rinse module that includes a rinse nozzle and a blow nozzle, where the blow nozzle blows gas to entrain and collect the rinse solution, preventing it from entering the plating tank.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the rinse solution is discharged from the rinse nozzle to the member to be rinsed, then the member to be rinsed is effectively rinsed, but a large amount of the rinse solution enters the plating tank and excessively dilutes the plating solution
Solution Approach 1:
The invention extracts the rinse solution from the plating tank environment by using a blow nozzle to blow gas across the space between the plating tank and substrate holder, carrying the rinse solution away from the plating tank before it can cause excessive dilution
Solution Approach 2:
The invention introduces gas as an intermediary substance that mediates between the rinse solution and the plating tank. The gas blown from the blow nozzle entrains the rinse solution droplets and carries them to the collection member, preventing direct contact with the plating solution
2Quantity of substance
If the blow nozzle blows gas to collect the rinse solution, then the plating solution is protected from dilution, but the device complexity increases due to additional components
Solution Approach 1:
The blow nozzle serves multiple functions: it blows gas to entrain rinse solution, creates a gas flow barrier to prevent rinse solution from falling into the plating tank, and directs the rinse solution to the collection member. This multi-functionality reduces the need for separate components for each function
Solution Approach 2:
The invention merges the rinsing function and the rinse solution collection function into a single integrated rinse module. The rinse nozzle and blow nozzle work together in coordination, and the collection member captures both the gas flow and entrained rinse solution in one component
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses the entrance of rinse solution into the plating tank, preventing excessive dilution of the plating solution.
Implementation Method 1
The blow nozzle blows out gas such that the gas crosses a space between the plating tank and the substrate holder while the rinse process is performed. The collection member collects the rinse solution dropping from the member to be rinsed and entrained in a flow of the gas blown out from the blow nozzle.
Data Source
AI summary
A plating apparatus 1000 includes a rinse module 40 configured to perform a rinse process. The rinse module includes: a rinse nozzle 41 configured to discharge the rinse solution to a member to be rinsed 25 while the rinse process is performed; a blow nozzle 42 disposed below the rinse nozzle and blowing out a gas such that the gas crosses a space between the plating tank and a substrate holder 20 while the rinse process is performed; and a collection member 50 disposed at downstream of the gas blown out from the blow nozzle and collecting the rinse solution dropping from the member to be rinsed and entrained in a flow of the gas blown out from the blow nozzle.