Rinsing Bath Drainage Simplification via Overflow Relocation

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Solution Overview

Problem

The existing rinsing bath systems require complex structures for liquid discharge and consume excessive rinsing liquid, leading to increased costs and potential contamination due to stagnant liquid flow.

Innovation Solution

A rinsing bath design with a simplified liquid discharge structure that includes an inner bath, an overflow bath, a stopper to control the drain hole, and a flow rate controller to manage liquid flow rates, reducing the amount of rinsing liquid used and preventing contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If two drain pipes (one for inner bath, one for overflow bath) are provided to discharge rinsing liquid, then the rinsing liquid can be discharged from both baths, but the structure becomes complicated and requires large installation space

Engineering Contradiction:

Improverinsing liquid discharge capabilityVSAvoiddrainage system structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The invention extracts the drain hole from the inner bath structure and relocates it to the overflow bath. The inner bath no longer has its own drain pipe, instead relying on the overflow bath's drainage system. This reduces the number of drain pipes from two to one, simplifying the overall structure while maintaining the ability to discharge rinsing liquid from both baths through the single drain pipe connected to the overflow bath

Inventive Principle:

Principle #2Taking out (Extraction)

2Loss of substance

If the rinsing liquid supply is stopped to reduce liquid usage, then the amount of rinsing liquid decreases, but bacteria may be generated in the stagnant flow passage causing contamination

Engineering Contradiction:

Improverinsing liquid consumptionVSAvoidbacteria contamination

Core Design Contradiction:

Loss of substanceVSObject-affected harmful factors

Solution Approach 1:

The invention maintains continuous flow of rinsing liquid through the flow rate controller, which regulates but does not stop the liquid supply. This continuous flow prevents bacteria generation in the flow passage while the controlled flow rate optimizes rinsing liquid usage. The system achieves both reduced liquid consumption and contamination prevention by maintaining minimal continuous flow rather than intermittent stopping

Inventive Principle:

Principle #20Continuity of useful action

3Quantity of substance

If a large volume of rinsing liquid is supplied to fill the inner bath before substrate cleaning, then the inner bath has sufficient liquid for cleaning, but excessive rinsing liquid is discharged before cleaning begins

Engineering Contradiction:

Improverinsing liquid volume in inner bathVSAvoidrinsing liquid discharge before cleaning

Core Design Contradiction:

Quantity of substanceVSLoss of substance

Solution Approach 1:

The invention uses preliminary action by having the flow rate controller pre-regulate the rinsing liquid supply to achieve the optimal volume in the inner bath before substrate cleaning begins. The controller calculates and maintains the precise amount of liquid needed, preventing overfilling and subsequent wasteful discharge. This preliminary control of liquid volume eliminates the need to discharge excessive liquid before cleaning starts

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces the amount of rinsing liquid used and simplifies the discharge structure, preventing bacterial contamination while maintaining efficient substrate cleaning.

Implementation Method 1

a stopper configured to close a drain hole provided in a bottom of the inner bath

Methodology Applied

Scientific EffectPhysical barrier (stopper):

Implementation Method 2

an actuator configured to move the stopper between a closing position at which the stopper closes the drain hole and an opening position at which the stopper is away from the drain hole

Methodology Applied

Scientific EffectMechanical movement:

Implementation Method 3

a rinsing liquid supply pipe configured to supply the rinsing liquid into the inner bath

Methodology Applied

Scientific EffectFluid flow:

Implementation Method 4

a drain pipe coupled to a bottom of the overflow bath

Methodology Applied

Scientific EffectGravity-driven flow: Gravitation

Implementation Method 5

an overflow bath configured to receive the rinsing liquid that has overflowed the inner bath

Methodology Applied

Scientific EffectOverflow flow:

Implementation Method 6

the substrate is immersed in the rinsing liquid held in the rinsing bath, so that the substrate is cleaned (or rinsed)

Methodology Applied

Scientific EffectAdhesion and rinsing:

Data Source

PatentUS10160013B2Rinsing bath and substrate cleaning method using such rinsing bath

Publication Date: 2018.12.25 EBARA CORP

AI summary

A rinsing bath which can simplify a discharging structure of a rinsing liquid is disclosed. The rinsing bath includes an inner bath for storing the rinsing liquid, an overflow bath configured to receive the rinsing liquid overflowing the inner bath, a stopper for closing a drain hole provided on a bottom of the inner bath, an actuator configured to move the stopper between a closing position in which the stopper closes the drain hole and a opening position in which the stopper is away from the drain hole, a rinsing liquid supply pipe configured to supply the rinsing liquid into the inner bath, and a drain pipe coupled to a bottom of the overflow bath. The drain hole communicates between an inside of the inner bath and an inside of the overflow bath.