Transfer Robot Arm Teaching for Angular Deviation Correction
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Solution Overview
Problem
Existing methods for teaching transfer robots in substrate processing systems require operator effort or alignment wafers, making it difficult to accurately correct angular deviations without visual recognition or additional sensors.
Innovation Solution
A method that uses protrusions and sensors to calculate and correct angular deviations of a transfer robot's arm by measuring the extension amount when the protrusions intersect with detection light, allowing the arm to be rotated automatically to eliminate deviations without operator intervention or additional alignment wafers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional teaching methods using sensors at loading/unloading ports are used, then the position of the transfer robot can be recognized, but angular deviation of the arm cannot be accurately corrected without operator intervention
Solution Approach 1:
The system performs self-teaching by automatically calculating angular deviation using sensors and protrusions without operator intervention. The transfer robot autonomously measures its own arm position deviations and computes correction values, eliminating the need for manual visual recognition and adjustment by operators.
Solution Approach 2:
The patent replaces manual visual recognition and mechanical adjustment with an automated optical measurement system. Sensors detect the positions of protrusions on the arm, and a controller automatically calculates angular deviation and generates correction commands, substituting human operators with an automated sensing and control system.
2Measurement precision
If alignment wafers are used for teaching, then angular deviation can be detected, but additional sensors and alignment procedures are required
Solution Approach 1:
The patent extracts the teaching function from complex external alignment procedures and reduces it to simple protrusion position detection. By using protrusions attached to the arm that are detected by existing sensors, the system eliminates the need for alignment wafers and additional specialized sensors, achieving angular deviation measurement through a simplified extraction of the essential measurement function.
Solution Approach 2:
The protrusions serve multiple functions: they act as mechanical features for wafer handling and simultaneously serve as optical targets for angular deviation measurement. The existing sensors at loading/unloading ports are utilized for both their original function and for detecting protrusion positions, eliminating the need for dedicated alignment sensors or wafers.
3Manufacturing precision
If manual visual recognition is used for teaching, then angular deviation can be corrected, but it requires operator effort and time
Solution Approach 1:
The system implements automatic feedback by continuously monitoring protrusion positions through sensors, calculating angular deviation in real-time, and generating correction commands without operator intervention. This closed-loop feedback system eliminates the time-consuming manual visual recognition process while maintaining or improving correction accuracy through precise optical measurement and automated computation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and automated correction of angular deviations, improving the precision of wafer placement in substrate processing systems without requiring operator effort or additional sensors, thus enhancing system efficiency and reliability.
Implementation Method 1
a first sensor is disposed on the left side with respect to the extension/contraction direction, and a second sensor is disposed on the right side with respect to the extension/contraction direction, and the first protrusion intersects with detection light of the first sensor during the extension/contraction of the arm, and the second protrusion intersects with detection light of the second sensor during the extension/contraction of the arm
Data Source
AI summary
A method for teaching a transfer robot is provided. The transfer robot includes an arm that rotates around a vertical rotation axis and extends/contracts on a horizontal plane. The arm has a first protrusion disposed on a left side and a second protrusion disposed on a right side. The first protrusion intersects with detection light of a first sensor and the second protrusion intersects with detection light of a second sensor during the extension/contraction of the arm. The method comprises calculating angular deviation of the arm around the rotation axis based on an extension amount of the arm at the time when the second protrusion intersects with the detection light of the second sensor, and the extension amount of the arm at the time when the first protrusion intersects the detection light of the first sensor, and rotating the arm around the rotation axis to eliminate the calculated angular deviation.