Robot Arm Sensor for Position Drift Detection in Semiconductor Handling
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Solution Overview
Problem
Conventional methods for detecting position drift in machine operations using robot arms are inefficient due to the need for high-intensity laser sensors, which are costly, bulky, and potentially harmful, and lack accuracy.
Innovation Solution
A sensor mounted on the robot arm eliminates the need for external laser sensors by using a sensor to transmit and receive signals directly, providing accurate position monitoring and cost savings while avoiding the drawbacks of traditional methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high-intensity laser sensors are used for position monitoring, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent extracts the sensing function from a separate external laser sensor system and integrates it directly into the robot arm's end effector. This eliminates the need for complex external laser triangulation systems while maintaining position monitoring accuracy through simpler integrated sensors.
Solution Approach 2:
The patent combines the position sensing function with the robot arm structure itself, merging what were previously separate systems (robot arm and external sensor) into a single integrated unit. This reduces overall system complexity while preserving measurement capabilities.
2Measurement precision
If external laser sensors are used for position monitoring, then measurement precision is improved, but device size increases
Solution Approach 1:
The patent nests the sensing system within the robot arm's existing structure, placing sensors inside or on the arm components rather than requiring separate external sensor housings. This nested arrangement significantly reduces the overall volume required for the sensing system.
3Measurement precision
If high-intensity laser sensors are used for position monitoring, then measurement precision is improved, but harmful factors increase
Solution Approach 1:
The patent changes the operating parameters of the sensing system by using lower-intensity sensors integrated close to the work area, eliminating the need for high-intensity lasers. This parameter change maintains measurement precision through proximity-based sensing while removing the harmful high-intensity laser radiation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances accuracy and reduces costs by integrating sensors onto the robot arm, effectively detecting position drift and preventing damage to substrates and machinery, thereby improving manufacturing processes.
Implementation Method 1
A sensor mounted on the robot arm eliminates the need for external laser sensors by using a sensor to transmit and receive signals directly
Data Source
AI summary
In an example embodiment, apparatus for detecting position drift in a machine operation using a robot arm, the robot arm being for operation on a semiconductor substrate, the robot arm and the semiconductor substrate being configured for relative movement therebetween, the apparatus includes an input for receiving an input signal from a sensor mounted on the robot arm; a detector for detecting, from the input signal, a detection of there being a predefined distance between the robot arm and the semiconductor substrate; wherein the apparatus is configured to determine, from the detection, whether there has been position drift.