Adjustable-Frequency Robot Blade to Prevent Resonance Vibration
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Robot blades in semiconductor fabrication equipment are vulnerable to resonance-induced vibrations due to frequency coincidences with equipment parts, leading to potential damage to semiconductor substrates.
Innovation Solution
A robot blade design featuring a blade body with a frequency variator, comprising detachable frequency variation blocks arranged in a tessellation pattern within a rectangular groove, allowing the blade's frequency to be adjusted by removing blocks to mismatch with equipment frequencies, thereby preventing resonance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the robot blade operates at a fixed frequency, then the blade structure is simple, but resonance may occur when the frequency coincides with equipment parts, causing vibration and damage to semiconductor substrates
Solution Approach 1:
The blade body is segmented into a base structure and detachable frequency variation blocks that can be selectively removed. This segmentation allows the blade configuration to be modified without redesigning the entire blade, enabling frequency adjustment while maintaining structural simplicity through modular components.
Solution Approach 2:
The blade transitions from a static fixed-frequency structure to a dynamic adjustable-frequency structure. By allowing selective removal of frequency variation blocks, the blade's natural frequency can be dynamically changed to avoid resonance with equipment parts, thereby preventing vibration and substrate damage.
2Adaptability or versatility
If frequency variation blocks are added to adjust the blade frequency, then resonance can be prevented, but the device complexity increases
Solution Approach 1:
The frequency adjustment mechanism is segmented into discrete, detachable blocks that can be independently removed. This segmentation provides adaptability by allowing selective frequency modification while keeping the overall structure simple through standardized modular components that interface with the blade body.
Solution Approach 2:
Frequency variation blocks are designed to be temporarily discarded (removed) when frequency adjustment is needed, and can be recovered (reinstalled) when the original frequency is required. This reversible modification approach enables frequency adaptability without permanent structural changes, maintaining simplicity through reusable components.
Data Source
AI summary
A robot blade may include a blade body and a frequency variator. The blade body may include a frequency variation groove. The frequency variator may be detachably arranged in the frequency variation groove to vary a frequency of the blade body. Thus, the robot blade may have a changed shape by removing at least one frequency variation block included in the frequency variator. Therefore, the robot blade having the changed shape may have a frequency different from a frequency of a part in semiconductor fabrication equipment to prevent a resonance. As a result, a vibration of the robot blade may be suppressed to prevent damage to a semiconductor substrate.