Robot Blade Tilt Detection Using Grayscale Image Monitoring
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Solution Overview
Problem
During semiconductor manufacturing, robot blades used to transport wafers between process modules and storage modules may become tilted, leading to potential damage and defective products due to the lack of effective real-time monitoring systems to prevent tilting issues.
Innovation Solution
A transportation monitoring method and system that captures images of the robot blade from a fixed field of view using an image capturing device, processes the images to determine the tilting state, and sends a warning signal when tilting is detected to prevent damage to the wafers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If robot blade tilting is not monitored, then the transportation process is simple and cost-effective, but the wafer may be scratched or damaged resulting in defective products
Solution Approach 1:
The patent replaces complex mechanical tilt sensors or interferometers with a vision-based detection system using a camera and image processing algorithm. The grayscale value analysis of the robot blade in captured images provides tilt information without requiring direct mechanical contact or complex optical interference patterns, thus maintaining wafer integrity while avoiding complex monitoring device implementation
Solution Approach 2:
The system creates a visual copy (image) of the robot blade and analyzes its grayscale properties to infer tilt state. This indirect measurement through image copying allows tilt detection without physical sensors on the blade itself, reducing device complexity while ensuring reliability through continuous visual monitoring
2Reliability
If real-time monitoring of robot blade is implemented, then wafer damage is prevented, but the system complexity and cost increase
Solution Approach 1:
The patent substitutes complex mechanical tilt sensing mechanisms with a vision-based system that captures images and analyzes grayscale values. This approach ensures transportation safety by continuously monitoring blade tilt while avoiding the complexity of mechanical sensors, signal processing circuits, and calibration systems associated with traditional tilt detection methods
Solution Approach 2:
The system uses the existing imaging infrastructure and processing capabilities already present in semiconductor manufacturing environments. By leveraging available cameras and image processing resources, the monitoring system achieves transportation safety without requiring dedicated complex hardware, allowing the system to essentially monitor itself using existing computational resources
Data Source
AI summary
A transportation monitoring method is provided, including the following steps. A monitoring image of a robot blade outside a carrier is captured from a fixed field of view by an image capturing device. The robot blade is configured to move an item into or out of the carrier. Next, a sampling area is obtained from the monitoring image by a processing device. Also, a tilting state of the robot blade is determined according to the sampling area by the processing device. When the processing device determines that the robot blade is tilted, the processing device sends a warning signal. A transportation monitoring system is also provided.