Robot Elbow Power Generation for Clean End Effector Wiring
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Solution Overview
Problem
Conventional systems for providing electric power to robotic end effectors in semiconductor processing and electronics processing face issues such as contamination, downtime, and increased energy consumption due to routed wires, slip rings, and wireless power transmission, which lead to particle generation, outgassing, and maintenance challenges.
Innovation Solution
A robot device with a generator integrated in the elbow, utilizing relative angular mechanical movement to generate electrical power, which is then provided to the end effector via wires, eliminating the need for external power sources and reducing mechanical components, thereby minimizing friction, contamination, and energy consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If routed wires, slip rings, or wireless power transmission are used to provide electric power to the robotic end effector, then power can be delivered to the end effector, but contamination, downtime, and energy consumption increase
Solution Approach 1:
The power generation function is extracted from external sources and placed directly into the elbow joint of the robotic device. This eliminates the need for routed wires, slip rings, or wireless power transmission systems that cause contamination, while maintaining reliable power delivery to the end effector
Solution Approach 2:
The robotic device generates its own power internally through the generator integrated in the elbow joint, which converts mechanical energy from the robot's own movements into electrical energy. This self-powered approach eliminates external power transmission methods that cause contamination and downtime
2Use of energy by moving object
If routed wires are used to provide power to the end effector, then power transmission is achieved, but particle generation and outgassing occur
Solution Approach 1:
The mechanical wire routing system is replaced with an electromagnetic power generation system. The generator in the elbow joint converts mechanical energy from robot movements into electrical energy, eliminating physical wires that generate particles and outgassing while maintaining power transmission to the end effector
3Ease of operation
If slip rings are used for power transmission, then electrical power can be delivered to moving parts, but maintenance challenges and downtime increase
Solution Approach 1:
The slip ring component is completely removed from the system. Power delivery to moving parts is achieved through the generator integrated in the elbow joint, which generates electricity from the robot's own mechanical movements, eliminating maintenance-prone slip rings while maintaining ease of operation
Solution Approach 2:
The system generates its own power internally through the elbow-mounted generator, eliminating the need for external power transmission components like slip rings that require maintenance. The robot's movements directly power its own operations without mechanical wear components
4Device complexity
If wireless power transmission is used, then power can be transmitted without physical connections, but energy consumption increases
Solution Approach 1:
The robotic device generates its own power internally through the generator in the elbow joint, converting mechanical energy from its own movements into electrical energy. This eliminates energy loss associated with wireless power transmission while maintaining simple device architecture
Solution Approach 2:
The system changes the energy conversion approach from external wireless transmission to internal mechanical-to-electrical conversion. The generator in the elbow joint directly converts the robot's mechanical movements into electrical power, improving energy efficiency while maintaining transmission simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces contamination, downtime, and energy consumption by generating power in-situ within the robot device, enhancing the reliability and efficiency of substrate processing systems by eliminating the need for external power transmission methods.
Implementation Method 1
The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow
Implementation Method 2
The power generator includes permanent magnets configured to attach to a first link of the robot device
Data Source
AI summary
A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.