Robot Fork Calibration Using Non-Linear Sensors
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Solution Overview
Problem
Current robot fork calibration methods in semiconductor manufacturing are inadequate, leading to potential collisions and damages during wafer pick-and-place operations due to positional offsets and rotation issues, which are not accurately detected in batch-type wafer heat treatment systems.
Innovation Solution
A robot fork calibration method and system that uses at least three non-linear sensors to detect distances and calculate the tilted angle and height of the fork, establishing a reference coordinate system to ensure accurate calibration and prevent collisions by calibrating the fork's height and levelness in real-time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If offline teaching data is used for robot fork positioning, then the robot can perform pick-and-place operations according to stored data, but positional offsets and rotation issues may cause collision with wafer or wafer carrier
Solution Approach 1:
The patent implements real-time feedback by using sensors to detect the actual position and attitude of the robot fork during operations. The detection module continuously monitors fork position coordinates and attitude angles, comparing them against the offline teaching data to identify deviations. This feedback loop enables dynamic adjustment of positioning parameters to prevent collisions while maintaining operational efficiency.
Solution Approach 2:
The patent replaces reliance on purely mechanical offline teaching positioning with an optical/electronic detection system. Instead of depending solely on pre-programmed mechanical coordinates, the system uses sensors to optically detect and electronically process real-time fork position and attitude data, substituting mechanical positioning with sensor-based positioning for improved accuracy and safety.
2Ease of manufacture
If periodic calibration is performed using stored offline teaching data, then the robot maintains operational capability, but collision risks remain due to un detected fork rotation or positional offset
Solution Approach 1:
The patent introduces a detection module as an intermediary between the robot fork and the calibration system. This module acts as a mediator that continuously measures actual fork position and attitude, providing real-time data that bridges the gap between periodic calibration events and continuous operation, thereby maintaining high measurement precision without complicating the calibration process.
Solution Approach 2:
The system implements self-service calibration by automatically detecting fork position and attitude deviations during normal operations and triggering recalibration when thresholds are exceeded. The detection module monitors itself and the robot system, enabling autonomous calibration decisions without requiring external intervention, thus maintaining precision while keeping the calibration process simple.
3Device complexity
If no real-time detection system is implemented, then the system structure remains simple, but collision of robot fork with wafer or wafer carrier cannot be prevented
Solution Approach 1:
The patent applies preliminary action by implementing real-time detection of fork position and attitude before collisions can occur. The detection module continuously monitors parameters and predicts potential collision risks by comparing actual positions with safe operation thresholds, enabling preventive calibration adjustments before harmful events occur, thus protecting wafers and equipment without requiring overly complex system structures.
Solution Approach 2:
The system transitions from static periodic calibration to dynamic real-time monitoring. The detection module continuously adapts to changing operational conditions by constantly measuring fork position and attitude, enabling the system to respond dynamically to deviations and adjust calibration parameters in real-time, thereby preventing collisions while maintaining reasonable system complexity.
Data Source
AI summary
A robot fork calibration method and system is provided. At least three non-linear arranged lower sensors are provided on a bottom surface of the fork to detect distances to a fixed detection point. The fixed detection point and a horizontal plane of the detection point define a reference coordinate system. Spatial coordinates of the lower sensors in the reference coordinate system are calculated and a plane equation as well as a tilted angle of the fork are obtained according to the spatial coordinates. Therefore, the height of the fork can be calibrated according to the Z axis coordinates of the lower sensors and the levelness of the fork can be calibrated according to the tilted angle.