Robot Hand Orientation Control for Guide Deformation Compensation
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Solution Overview
Problem
Conventional robots used for transferring substrates like semiconductor wafers or printed circuit boards may fail to hold or damage the substrates due to body deformation causing non-horizontal hand orientations.
Innovation Solution
A robot configuration with a guide, mover, hand, deformation acquirer, and orientation adjuster, where the orientation adjuster adjusts the hand's orientation based on guide deformation information to align with the substrate, using a detection sensor and controller to ensure proper alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the robot body is rigid and fixed in structure, then manufacturing precision is improved, but adaptability to thermal deformation deteriorates
Solution Approach 1:
The patent applies the dynamics principle by making the hand orientation adjustable and adaptable rather than fixed. The orientation adjuster dynamically modifies the hand's orientation based on detected guide deformations, allowing the system to adapt to thermal expansions and structural variations while maintaining precise substrate handling.
Solution Approach 2:
The patent implements parameter changes by varying the hand orientation parameters in response to detected guide deformations. The controller modifies orientation parameters based on deformation information from the deformation acquirer, enabling the system to compensate for thermal and structural variations without changing the physical guide structure.
2Device complexity
If the guide structure is simplified, then device complexity is reduced, but manufacturing precision deteriorates due to guide deformation
Solution Approach 1:
The patent implements feedback by using the deformation acquirer to detect guide deformations and feeding this information back to the controller, which then adjusts the hand orientation via the orientation adjuster. This closed-loop feedback system compensates for guide deformations without requiring a more complex rigid guide structure.
Solution Approach 2:
The patent replaces the mechanical solution of a perfectly rigid and precise guide structure with a control-based approach. Instead of relying on mechanical precision alone, the system uses detection and control mechanisms to achieve the desired hand orientation, substituting complex mechanical design with a more flexible control system.
3Stability of the object's composition
If thermal expansion is prevented by rigid constraints, then stability is improved, but adaptability to temperature changes deteriorates
Solution Approach 1:
The patent uses feedback to detect and compensate for thermal expansion effects. The deformation acquirer monitors guide deformations caused by temperature changes, and the controller adjusts hand orientation accordingly, allowing the system to maintain stability while adapting to thermal conditions without rigid constraints.
Solution Approach 2:
The patent adapts to thermal expansion by changing operational parameters (hand orientation) in response to detected deformations rather than trying to prevent deformation through rigid constraints. This allows the guide structure to thermally expand freely while the control system compensates for the resulting orientation changes.
Data Source
AI summary
A robot includes a guide, a mover, a hand, a deformation acquirer, a orientation adjuster, and a controller. The mover is installed to the guide and movable in a direction that the guide guides along. The hand is installed to the mover and holds a substrate. The deformation acquirer acquires information on a deformation of the guide. The orientation adjuster adjusts an orientation of the hand according to the deformation of the guide acquired by the deformation acquirer. The controller controls operation of the orientation adjuster. The controller adjusts the orientation of the hand performing a holding operation on the substrate to be transferred by using the orientation adjuster based on the information on the deformation of the guide.