Robot Hand Oblique Transfer Trajectory for Wafer Rubbing
Solution Overview
Problem
Conventional robot systems used in semiconductor manufacturing face challenges in efficiently transferring wafers between processing units, including prolonged transfer times and potential damage due to rubbing during vertical movement.
Innovation Solution
The robot system incorporates a hand with a gripping mechanism and an arm that moves horizontally while vertically positioning, allowing for oblique backward or forward movement to prevent wafer rubbing and reduce transfer time by retracting the hand after reaching the transfer position, with a robot controller managing the operation to optimize the transfer process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the hand moves vertically to transfer the wafer, then the transfer position can be reached, but the wafer may be damaged due to rubbing
Solution Approach 1:
The patent changes the movement trajectory from purely vertical to oblique by adding horizontal movement components. The hand moves obliquely backward or forward during the transfer process, preventing the wafer from rubbing against processing units while still achieving vertical positioning for transfer.
2Productivity
If the hand moves directly to the transfer position, then transfer time is minimized, but wafer damage may occur
Solution Approach 1:
The patent introduces oblique movement trajectories that combine vertical and horizontal components. This allows the hand to reach the transfer position efficiently while preventing wafer rubbing through backward or forward movement, thus maintaining both speed and reliability.
3Manufacturing precision
If the hand remains stationary at the transfer position, then precise positioning is achieved, but transfer time increases
Solution Approach 1:
The patent maintains continuous motion of the hand during the transfer process. Instead of stopping at the transfer position, the hand continues moving obliquely backward or forward, eliminating idle time while ensuring precise transfer through controlled continuous motion.
Data Source
AI summary
A robot system includes: a robot including a hand configured to hold a thin plate-shaped workpiece and an arm configured to move the hand; and a robot controller configured to control the robot. The robot controller controls the robot to perform a transfer of the workpiece at a predetermined workpiece transfer position in such a way that the hand is moved in a horizontal direction while being moved in a vertical direction after the hand has reached the workpiece transfer position.