Robot Hand Orientation Adjustment for Substrate Transfer Alignment
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Solution Overview
Problem
Conventional substrate transfer robots may damage substrates due to misalignment between the robot's hand orientation and the substrate's orientation, especially when the substrate is not in its usual orientation.
Innovation Solution
A robot system with a hand orientation adjuster and controller that adjusts the hand's orientation based on substrate orientation information, using a tilter and mapping sensor to ensure proper alignment before transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the robot uses a fixed hand orientation for substrate transfer, then the device complexity is reduced, but the substrate may be damaged when the substrate orientation is not appropriate
Solution Approach 1:
The hand orientation adjuster dynamically changes the hand's orientation angle based on the detected substrate orientation. The system transitions from a fixed hand configuration to a dynamic one where the hand can be tilted at various angles to match the substrate, thereby preventing damage while maintaining relatively simple device structure.
Solution Approach 2:
The system changes the orientation parameter of the hand to adapt to different substrate orientations. By adjusting the hand orientation angle as a variable parameter based on substrate detection, the system prevents substrate damage without requiring complex mechanical structures.
2Object-affected harmful factors
If the robot adjusts hand orientation based on substrate orientation, then substrate damage is prevented, but the device complexity increases due to additional sensors and actuators
Solution Approach 1:
The hand orientation adjuster serves multiple functions: it positions the hand at the correct angle for substrate pickup, ensures proper alignment during transfer, and prevents substrate damage. This multi-functionality reduces the need for separate protective mechanisms, thereby limiting the increase in device complexity.
Solution Approach 2:
The system uses a feedback loop where the substrate orientation is detected, processed, and used to automatically adjust the hand orientation. This closed-loop control enables the system to adapt to various substrate orientations automatically, reducing the need for manual intervention and complex mechanical adjustments.
3Productivity
If the robot quickly transfers substrates without orientation adjustment, then productivity is improved, but substrates may be damaged due to misalignment
Solution Approach 1:
The system performs preliminary detection of substrate orientation before the transfer operation. By detecting and adjusting hand orientation in advance, the system ensures proper alignment is achieved before the actual transfer, allowing for quick execution without compromising substrate safety.
Solution Approach 2:
Once the hand orientation is adjusted to match the substrate orientation, the actual transfer operation can be executed quickly without further adjustments. The system skips unnecessary intermediate steps by directly transferring the substrate at the correct orientation, maintaining high productivity while preventing damage.
Data Source
AI summary
A robot that transfers a substrate includes an arm, a hand, a substrate orientation acquirer, a hand orientation adjuster, and a control unit. The hand is installed to the arm and holds and transfers the substrate. The substrate orientation acquirer acquires information about an orientation of a to-be-transferred substrate, which is the substrate to be transferred. The hand orientation adjuster adjusts an orientation of the hand with respect to the to-be-transferred substrate. The control unit controls operations of the arm, the hand, and the hand orientation adjuster. The control unit adjusts the orientation of the hand performing a taking-out operation on the to-be-transferred substrate by using the hand orientation adjuster based on the information about the orientation of the to-be-transferred substrate.