Robot Hand Wafer Positioning for Precise Teaching
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Solution Overview
Problem
Industrial robots without edge grip type holding parts face challenges in accurately mounting semiconductor wafers, leading to difficulties in performing teaching tasks with high precision and efficiency, especially when using suction type holding parts or no holding parts at all.
Innovation Solution
A teaching method that involves attaching a positioning member to the hand to determine the horizontal position of the semiconductor wafer, allowing for quick and accurate mounting of the wafer at a normal position, even in the absence of an edge grip type holding part, by using a protruded part for correcting the wafer's position during attachment and detachment of the positioning member.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a hand is provided with no holding part or a suction type holding part, then the hand structure is simplified and costs are reduced, but the position of the semiconductor wafer in horizontal direction cannot be determined accurately
Solution Approach 1:
A positioning member is introduced as an intermediary element between the hand and the semiconductor wafer. This positioning member determines the horizontal position of the wafer, enabling accurate teaching without requiring complex holding parts on the hand. The positioning member acts as a mediator that provides the necessary positional reference.
Solution Approach 2:
The function of position determination is separated from the hand structure itself. Instead of integrating positioning capabilities into the hand, the positioning function is segmented into a separate positioning member that can be independently attached and removed. This allows the hand to remain simple while achieving accurate positioning during teaching.
2Measurement precision
If a positioning member is attached to the hand to determine wafer position accurately, then teaching accuracy is improved, but the time required for mounting and adjusting the wafer increases
Solution Approach 1:
The positioning member is pre-positioned on the hand before the semiconductor wafer is mounted. This preliminary action of attaching the positioning member first allows the wafer to be quickly placed at the correct horizontal position without requiring time-consuming adjustments afterward, thus reducing overall mounting time while maintaining teaching accuracy.
3Measurement precision
If an edge grip type holding part is used to mount the semiconductor wafer at a normal position, then teaching can be performed with high accuracy, but the hand structure becomes complex and costly
Solution Approach 1:
The positioning member serves as an intermediary that provides the positioning function normally performed by edge grip holding parts. By using this separate positioning member, the hand itself can have a simpler structure without edge grip mechanisms, yet still achieve accurate teaching through the positioning member's horizontal position determination capability.
Data Source
AI summary
In a teaching method for an industrial robot having a hand on which a conveyance object is to be mounted, the teaching method includes a positioning member attaching step in which a positioning member for determining a position of a conveyance object to be mounted on the hand in a horizontal direction is attached to an upper face side of the hand and, after that, a teaching step in which the hand is moved to a predetermined position to perform teaching for the industrial robot, and after that, a positioning member detaching step in which the positioning member is detached from the hand. When the conveyance object is mounted on the hand in a state that an end face of the conveyance object is contacted with the positioning member, the conveyance object is disposed at a normal mounting position on the hand.