Dual-Arm Robot Leveling Jig for End Effector Reinstallation Alignment
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Solution Overview
Problem
Conventional substrate processing systems face issues with misalignment of end effectors during reinstallation, leading to potential wafer displacement and particle contamination due to reliance on human observation or metallic tools for alignment.
Innovation Solution
A dual arm robot system with a leveling jig is introduced to align upper and lower end effectors, using a jig that accommodates the lower end effector and ensures precise alignment through a structured design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If human observation (eyeballing) is used for alignment, then the alignment process is simple and requires no tools, but alignment precision deteriorates due to human error
Solution Approach 1:
A non-metallic alignment tool (jig) is introduced as an intermediary device between the upper and lower end effectors. The jig includes alignment features such as pins or fixtures that physically guide and constrain the relative positioning of the end effectors, replacing human visual estimation with a mechanical intermediary that ensures precise and repeatable alignment.
2Measurement precision
If metallic tools (such as metal panel) are used for alignment, then alignment precision improves, but particle contamination increases
Solution Approach 1:
The material parameter of the alignment tool is changed from metallic to non-metallic materials. This material substitution maintains the structural integrity and alignment functionality of the tool while eliminating the generation of metal particles that would contaminate the semiconductor fabrication environment. The non-metallic material achieves the same alignment precision without the harmful side effect of particle generation.
3Duration of action of stationary object
If end effectors are removed for routine maintenance, then end effector longevity improves, but alignment reliability deteriorates upon reinstallation
Solution Approach 1:
The alignment tool is prepared and positioned in advance before the end effectors are removed for maintenance. When the end effectors are reinstalled, the pre-positioned tool provides immediate reference features that guide the alignment process. This preliminary preparation ensures that even after maintenance removal and reinstallation, the end effectors can be quickly and accurately realigned, maintaining reliability throughout the maintenance cycle.
Data Source
AI summary
A jig is provided for aligning an upper end effector and a lower end effector of a dual arm robot of a substrate processing system. The jig is configured to accommodate the lower end effector and the upper end effector is aligned with the lower end effector using the jig. Specifically, the jig includes an upper top surface and an upper side surface, and a lower top surface separated from a lower bottom surface by a lower side surface. The upper side surface and the lower top surface couple to form a right angle. Lower end effector aligns with the jig by coupling with the lower top surface and the upper side surface. After alignment of the lower end effector, upper end effector aligns with lower end effector by coupling with the jig.