Robot Motion Profile Design Using Natural Frequency Shaping
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Solution Overview
Problem
Current motion profile design for robots in semiconductor manufacturing is time-consuming and prone to generating vibrations that can damage or contaminate substrates, lacking a systematic approach to reduce or attenuate such vibrations.
Innovation Solution
A method involving vibration information collection, design of motion profiles based on natural frequency, and application of input shaping techniques to reduce vibrations, using primary, secondary, and tertiary vibration coefficients, and considering design parameters like actuator limits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a trapezoidal motion profile is used for robot operation, then the robot can complete movement tasks, but vibrations are generated that can damage or contaminate substrates
Solution Approach 1:
The patent applies vibration analysis and damping techniques to the motion profile design. By incorporating natural frequency information and designing motion profiles that account for vibrational characteristics, the system reduces harmful vibrations during robot operation while maintaining productivity.
Solution Approach 2:
The patent changes the parameters of the motion profile by incorporating natural frequency data and vibration coefficients. This allows the motion profile to be optimized for both task completion and vibration reduction, preventing substrate damage while maintaining operational efficiency.
2Ease of operation
If motion profile design is performed without systematic criteria, then design flexibility is maintained, but significant time is required and trial and errors occur
Solution Approach 1:
The patent incorporates feedback mechanisms by collecting vibration information during robot operation and using this data to refine motion profile design. This systematic approach reduces trial and error while maintaining design flexibility, as the feedback loop allows for continuous optimization based on actual performance data.
Solution Approach 2:
The patent performs preliminary vibration analysis and natural frequency measurement before finalizing the motion profile design. This preliminary action provides a systematic foundation for design, reducing the need for extensive trial and error while preserving design flexibility through the established framework.
3Object-affected harmful factors
If vibration reduction techniques are incorporated into motion profile design, then substrate protection is improved, but design complexity increases
Solution Approach 1:
The patent enables the robot system to self-diagnose vibration characteristics by collecting vibration information during operation and automatically using this data for motion profile optimization. This self-service approach reduces design complexity by eliminating the need for extensive external analysis while improving substrate protection through data-driven design.
4Stability of the object's composition
If natural frequency information is collected and used in motion profile design, then vibration attenuation is achieved, but measurement and analysis requirements increase
Solution Approach 1:
The robot system automatically collects vibration information during normal operation and uses this data to determine natural frequency characteristics. This self-service measurement approach reduces the difficulty of detection and analysis by eliminating the need for separate measurement equipment and procedures, while achieving vibration attenuation through the collected data.
Data Source
AI summary
Disclosed is a method of controlling a robot system, the method including: a vibration information collection operation of observing vibration generated during an operation of a robot and collecting natural frequency of the vibration; a motion profile design operation of designing a motion profile based on the natural frequency collected in the vibration information collection operation; and a robot operating operation of operating the robot based on the motion profile designed in the motion profile design operation, in which the motion profile design operation includes designing a first order motion profile based on a primary vibration coefficient, which is a multiple of a reciprocal number of the natural frequency.