Robot-Held Object Alignment Using Sensor-Based Error Correction

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Solution Overview

Problem

In semiconductor processing and other electronics processing, robotic arms often pick up objects with rotational and positional misalignment, requiring the use of aligner stations for correction, which increases transfer time, introduces additional errors, and consumes valuable space and resources.

Innovation Solution

A method and system that utilize a non-contact sensor, such as a camera, to detect misalignment of objects on a robot arm's end effector, allowing for real-time adjustment and correction without the need for an aligner station by determining rotational and positional errors through image processing and adjusting the robot arm's position accordingly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If an aligner station is used to correct object misalignment, then alignment accuracy is improved, but transfer time increases and system complexity increases

Engineering Contradiction:
Improvealignment accuracyVSAvoidtransfer time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent extracts the alignment correction function from a separate aligner station and integrates it into the robot arm itself. The robot arm acquires images of the object, determines misalignment, and corrects it through coordinated movement, eliminating the need for a dedicated aligner station and reducing transfer time while maintaining alignment accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent combines multiple functions (object acquisition, image capture, misalignment detection, and alignment correction) into a single integrated system on the robot arm. This merging of functions eliminates the need for separate aligner stations, reduces system complexity, and decreases transfer time while maintaining manufacturing precision.

Inventive Principle:
Principle #5Merging (Combining)

2Manufacturing precision

If an aligner station is used to correct object misalignment, then alignment accuracy is improved, but system cost and space consumption increase

Engineering Contradiction:
Improvealignment accuracyVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts the alignment correction capability from a separate aligner station and embeds it within the robot arm system. By using the robot arm's existing imaging and movement capabilities, the system eliminates the need for additional aligner station hardware, reducing both device complexity and space requirements while maintaining alignment accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent makes the robot arm multi-functional by enabling it to perform both object transport and alignment correction tasks. The robot arm uses its imaging system to detect misalignment and its movement capabilities to correct it, eliminating the need for dedicated aligner station equipment and reducing overall system complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Manufacturing precision

If traditional end effector design is used to accommodate aligner station, then alignment correction is possible, but design flexibility and effectiveness for other purposes are reduced

Engineering Contradiction:
Improvealignment correction capabilityVSAvoiddesign flexibility
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent extracts the alignment correction function from the end effector design requirements and implements it through the robot arm's imaging and movement capabilities. This allows the end effector to be designed purely for its primary function without incorporating aligner station accommodation features, thereby improving design flexibility and versatility.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent enables the robot arm system to perform alignment correction on its own without requiring special end effector design features or external aligner stations. The system uses its own imaging system to detect misalignment and its own movement capabilities to correct it, making the end effector design simpler and more versatile.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach eliminates the need for aligner stations, reducing transfer time, improving accuracy, and freeing up space, while allowing for more flexible design of end effectors and adapters, thus enhancing the overall efficiency and cost-effectiveness of the processing system.

Implementation Method 1

Sensor data may be generated of the object using the non-contact sensor while the object is held on the end effector of the robot arm

Methodology Applied
Scientific EffectOptical detection: Photography

Data Source

PatentUS12142503B2Sensor-based correction of robot-held object
Publication Date: 2024.11.12 APPLIED MATERIALS INC
  • US12142503B2 patent drawing
  • US12142503B2 patent drawing
  • US12142503B2 patent drawing

AI summary

A robotic object handling system comprises a robot arm, an image sensor, a first station, and a computing device. The computing device is to cause the robot arm to pick up an object on an end effector, cause the image sensor to generate sensor data of the object, determine at least one of (i) a rotational error of the object or (ii) a positional error of the object based on the sensor data, cause an adjustment to the robot arm to approximately remove at least one of the rotational error or the positional error, and cause the robot arm to place the object at the first station without at least one of the rotational error or the positional error.