Transfer Robot Sensor Calibration for Precise Substrate Placement
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Solution Overview
Problem
Existing substrate processing technologies require manual hand-off calibrations, which are time-consuming and reduce substrate throughput and productivity, as they necessitate the disassembly of integrated tools for substantial periods.
Innovation Solution
The implementation of an in-situ spatial recognition calibration system using sensors on transfer robots to provide continuous closed-loop feedback for precise substrate placement within processing chambers, eliminating the need for manual calibrations and specialized tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual hand-off calibrations are performed using specialized tools and jigs, then substrate placement precision is improved, but tool downtime increases and productivity decreases
Solution Approach 1:
The patent replaces manual mechanical calibration operations with an automated optical sensor system. The sensor mounted on the transfer robot captures images of the processing chamber interior, and image processing algorithms automatically determine spatial relationships and calibration parameters, eliminating the need for manual intervention with specialized tools.
Solution Approach 2:
The system performs self-calibration by using the transfer robot's own sensor to capture images and automatically compute calibration data. The robot positions itself, captures the necessary spatial information, and the controller processes this data to establish accurate positioning without external assistance or tool disassembly.
2Measurement precision
If manual calibrations are performed with specialized centering tools, then substrate centering accuracy is improved, but calibration time increases
Solution Approach 1:
The patent replaces manual mechanical centering operations with an automated optical measurement system. The sensor captures images of the processing chamber interior, and image processing algorithms automatically determine the center position and spatial relationships, eliminating time-consuming manual measurements.
Solution Approach 2:
The calibration process is integrated into the normal operation flow without requiring tool disassembly or separate calibration sessions. The sensor continuously captures spatial information during robot movement, and calibration data is computed in real-time, maintaining continuous productive action.
3Ease of operation
If integrated tool disassembly is performed for calibration, then calibration accessibility is improved, but overall tool availability decreases
Solution Approach 1:
The patent replaces physical disassembly operations with non-invasive optical sensing. The sensor mounted on the transfer robot captures images through the existing chamber opening without requiring any parts to be removed or accessed, maintaining tool integrity and availability.
Solution Approach 2:
The optical sensor acts as an intermediary that obtains calibration information without direct physical contact or disassembly. The sensor captures images of chamber interior features, and image processing extracts spatial relationships, serving as a non-invasive mediator between the calibration system and the processing chamber.
Data Source
AI summary
Methods and apparatus for processing a substrate are provided herein. For example, an apparatus for processing a substrate comprises a transfer robot configured to position a substrate on a substrate support disposed within an interior of a processing chamber configured to process the substrate and a sensor disposed on the transfer robot, operably connected to a controller of the processing chamber, and configured with an angle of view to provide in-situ continuous closed loop feedback relating to spatial information of the interior of the processing chamber to the controller.