Robot End Station Teaching Using Chuck Geometry Verification
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Solution Overview
Problem
Conventional transport robot teaching methods for substrate processing chambers, often operated under vacuum and elevated temperatures, are not feasible or cost-effective due to the need for extensive modifications, necessitating a method for auto teaching robotic arms to place workpieces accurately.
Innovation Solution
A method and apparatus that utilize geometric relationships between a substrate and an aligner's chuck to determine eccentricity, allowing robots to align workpieces concentrically with an electrostatic chuck, thereby enabling precise placement and verification without requiring additional sensors or modifications to the processing environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional sensor, camera and fixture methods are used for robot teaching, then positioning accuracy can be achieved, but the system complexity and cost increase significantly due to extensive modifications required in the vacuum chamber
Solution Approach 1:
The system uses the existing electrostatic chuck's geometric center as a self-referencing point for robot teaching. By utilizing the chuck's own geometric properties rather than external sensors or fixtures, the system achieves accurate positioning without adding complex external measurement devices. The method leverages the inherent characteristics of the processing equipment to perform the teaching function.
Solution Approach 2:
The invention extracts and utilizes the geometric center information from the electrostatic chuck itself as the reference point for robot teaching. Instead of relying on external sensors, cameras, or fixtures that would require extensive modifications, the system extracts the essential positioning information directly from the chuck's geometric properties, simplifying the overall system while maintaining accuracy.
2Measurement precision
If extensive modifications are made to the processing chamber for robot teaching, then positioning can be achieved, but the loss of time for setup and the increase in cost become prohibitive
Solution Approach 1:
The geometric center of the electrostatic chuck is predetermined and stored in the system memory before robot operation begins. This preliminary preparation of reference data eliminates the need for time-consuming setup procedures during actual robot teaching operations. The system has the reference information ready in advance, allowing for rapid deployment without extensive modifications or calibration time.
Solution Approach 2:
The system uses pre-stored geometric center data from the electrostatic chuck to perform self-teaching without requiring external setup procedures. By utilizing internally stored reference information rather than requiring external calibration equipment or procedures, the system eliminates time-consuming setup steps while maintaining positioning accuracy.
3Measurement precision
If additional sensors or fixtures are installed for robot teaching, then positioning accuracy improves, but the device complexity and manufacturing cost increase
Solution Approach 1:
The electrostatic chuck serves multiple functions: it is both the processing tool for holding substrates and the reference source for robot teaching. By making the chuck multi-functional, the system eliminates the need for separate sensors, cameras, or fixtures that would add to manufacturing costs. The same component performs both processing and positioning reference functions.
Solution Approach 2:
The electrostatic chuck provides its own geometric center information for robot teaching without requiring additional sensors or fixtures. This self-service approach allows the system to achieve positioning accuracy using existing components, avoiding the need for expensive additional hardware and reducing overall manufacturing costs.
Data Source
AI summary
The disclosure generally relates to a robotic system for positioning a workpiece relative to certain machinery. In one embodiment, the disclosure relates to a method, system and apparatus to teach positioning robots to place a workpiece relative to a processing center such as a chuck and to verify the placement using geometrical relationship therebetween. In one embodiment, the disclosure relates to an apparatus to position a workpiece at a chuck of a processing station. The apparatus includes a memory circuitry comprising an executable code; a central processing unit (CPU) in communication with the memory circuitry; an end effector (EE) for grasping and relocating the workpiece as well as an alignment chuck and a processing chuck. The alignment chuck and the wafer may be used to determine the distance between the chuck's center location (E) and the workpiece's center using various geometric relationships.