Robot End Effector Teaching Points for Faster Substrate Transfer
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Solution Overview
Problem
Conventional robot control devices face challenges in promptly transferring substrates while holding them, due to the need for determining whether the end effector passes the installation position, which can hinder the transfer process.
Innovation Solution
A robot control device and method that inhibit determining whether the end effector passes the installation position and prevent stopping the end effector during a first operation, allowing the robot to switch between states and promptly transfer substrates by moving the end effector between predefined teaching points.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the robot control device determines whether the end effector passes the installation position, then the substrate transfer accuracy is improved, but the substrate transfer speed deteriorates
Solution Approach 1:
The patent applies preliminary action by pre-defining teaching points (first teaching point above installation position, second teaching point below installation position) and pre-programming the transfer path. The robot moves directly between these predetermined points without real-time detection, eliminating the need for continuous position checking during operation while maintaining accurate substrate placement.
Solution Approach 2:
The patent extracts the position determination function from the active transfer process. Instead of continuously detecting whether the end effector passes the installation position during movement, the system removes this detection step entirely by relying on pre-established teaching points and controlled movement between them, thereby eliminating the time delay caused by real-time detection.
2Manufacturing precision
If the robot control device stops the end effector to determine position, then the substrate placement precision is improved, but the productivity deteriorates
Solution Approach 1:
The patent implements continuity of useful action by enabling the end effector to move continuously between the first and second teaching points without stopping. The substrate transfer operation proceeds uninterrupted, maintaining both speed and precision through pre-programmed positional control rather than iterative detection and stopping.
3Measurement precision
If the robot performs frequent position checks during substrate transfer, then the transfer accuracy is improved, but the operation time increases
Solution Approach 1:
The system performs preliminary positioning by establishing teaching points above and below the installation position before the actual transfer operation. This pre-programming eliminates the need for frequent position checks during transfer, as the robot follows a predetermined path between these points, reducing operation time while maintaining accuracy.
Data Source
AI summary
A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate is provided. The substrate becomes in a first state where an end effector holds the substrate and the substrate is not placed at an installation position, when the end effector positions at a first teaching point above the installation position. The substrate becomes in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector positions at a second teaching point below the installation position. The first and second states can be switched by causing the robot to perform a first operation to move the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point.


