Robotic Handling Device Synchronous Positioning for Substrates
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Solution Overview
Problem
Existing handling devices for substrates face challenges in achieving accurate positioning with minimal time and space requirements, high throughput, and low development effort, while maintaining a simple structure and compatibility with clean room conditions.
Innovation Solution
A handling device with a central axis of rotation for a robotic end effector, featuring a rotatable support plate and integrated positioning device that is synchronously driven with the robotic arm, allowing for vacuum-sealed and atmospherically encapsulated operation, with the positioning device housed within the robotic arm to reduce structural complexity and enhance adaptability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the positioning device is integrated into the robotic arm, then the structural complexity is reduced, but the manufacturing precision requirement increases
Solution Approach 1:
The positioning device is integrated into the robotic arm structure, merging two previously separate components into one unified system. This reduces the number of separate parts and simplifies the overall structure while maintaining positioning functionality through the robotic arm's existing precision mechanisms
Solution Approach 2:
The robotic arm is designed to serve dual functions: both positioning substrates and providing structural support for the positioning device. This multi-functionality reduces the need for separate dedicated positioning structures, thereby simplifying the overall device complexity while maintaining precision through the robotic arm's controlled motion capabilities
2Manufacturing precision
If the positioning device is driven synchronously with the robotic arm, then the positioning accuracy is improved, but the device complexity increases
Solution Approach 1:
The drive mechanisms for the robotic arm and positioning device are merged into a single synchronous control system. This allows both components to be driven by the same motor or coordinated control unit, achieving precise positioning through unified control while avoiding the complexity of separate independent drive systems
Solution Approach 2:
Synchronous driving implements feedback control where the position and motion of the robotic arm are continuously monitored and used to adjust the positioning device's motion. This feedback mechanism ensures high positioning accuracy while the centralized control system manages the complexity of coordinating both components
3Adaptability or versatility
If the handling device is vacuum sealed, then the clean room compatibility is improved, but the manufacturing complexity increases
Solution Approach 1:
The handling device is designed with vacuum sealing capabilities, creating a controlled inert environment that prevents contamination in clean room settings. This allows the device to operate in vacuum or controlled atmospheric conditions while using standard manufacturing techniques for creating sealed chambers and connections
4Volume of moving object
If the positioning device is compactly integrated, then the space requirement is reduced, but the ease of manufacture decreases
Solution Approach 1:
The positioning device is nested within the robotic arm structure, with components arranged in a compact, space-efficient configuration. This nesting approach minimizes the overall volume occupied by the system while using modular design elements that facilitate assembly and manufacturing
Data Source
Figure 1~2
Figure 3~4
Figure 5~8
AI summary
Handling device (1) for substrates (2), in particular semiconductor substrates, with a central axis of rotation (7) for a robotics (3) extending onto an end effector (9) with at least one substrate support (12) and a positioning device (4) located in the reach area of the end effector (9) of the robotics (3) with a rotatable support plate (14) perpendicular to the central axis of rotation (7) for the substrates (2) to be transferred, wherein the positioning device (4) forms a component of the robotics (3) and is driven to rotate synchronously with the robotics (3).