Robotic Wafer Testing Workflow for Contamination-Free Wet Processing
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Solution Overview
Problem
Existing semiconductor testing methods are inefficient for small quantities and sizes of semiconductor wafers, lacking automation and prone to human error and contamination.
Innovation Solution
An automated system with a holder, gripper, robot, and test device for processing, rinsing, and drying semiconductor specimens, utilizing a gripper with a rotation function and disposable components to prevent contamination, and temperature control for precise processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual testing is used for semiconductor specimens, then flexibility in handling small quantities and sizes is maintained, but experimental errors increase and contamination occurs
Solution Approach 1:
The system enables automatic self-processing of semiconductor specimens through integrated modules. The specimen is automatically transferred between processing, rinsing, and drying areas without manual intervention, eliminating human error and contamination while maintaining reliability for small quantity testing
Solution Approach 2:
Manual mechanical operations are replaced with an automated robotic system featuring a gripper, transfer mechanism, and controlled movement systems. This substitution eliminates human contact with specimens and reagents, preventing contamination while improving experimental accuracy
2Productivity
If automated processing is implemented, then productivity and consistency are improved, but device complexity increases
Solution Approach 1:
The automated testing system is divided into distinct functional modules: processing area with etching tank, rinsing area with rinse tank, and drying area with drying tank. Each module handles a specific operation, improving productivity through systematic automation while managing complexity through modular design
Solution Approach 2:
The holder serves multiple functions by securing the semiconductor specimen during processing, rinsing, and drying operations. The transfer mechanism universally moves specimens between all areas, reducing the need for separate handling systems and managing overall device complexity
3Object-affected harmful factors
If disposable gripper is used, then cross-contamination is prevented, but loss of substance increases
Solution Approach 1:
A disposable gripper is used to hold and transfer semiconductor specimens between processing areas. The gripper is discarded after single use to prevent cross-contamination of reagents and specimens, eliminating harmful contamination effects despite the loss of the disposable component
4Manufacturing precision
If rotation function is added to end effector, then rinsing performance is improved, but device complexity increases
Solution Approach 1:
The end effector incorporates a rotation function that dynamically adjusts the orientation of the holder during rinsing operations. This rotation improves rinsing performance by exposing all surfaces of the semiconductor specimen to the rinsing solution, enhancing cleaning efficiency while adding only minimal rotational mechanism complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces experimental errors, ensures consistent results, and prevents cross-contamination by automating the testing process for semiconductor specimens, optimizing materials for processes like cleaning and chemical mechanical polishing.
Implementation Method 1
a processing area where the holder is dipped into the reagent within the container using the end effector and rotated to chemically process the semiconductor specimen
Implementation Method 2
a rinsing area where the holder and the semiconductor specimen are rinsed using the gripper connected to the end effector
Implementation Method 3
a drying area where the holder and the semiconductor specimen are dried using the gripper connected to the end effector
Data Source
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AI summary
An automated system (1) for testing a semiconductor specimen includes: a holder configured to hold the semiconductor specimen; a container configured to hold a reagent; a gripper configured to grip the holder; a robot (20) including an end effector (22) configured to manipulate the gripper between a gripping mode and a release mode; and a test device (100) configured to test the semiconductor specimen, and including: a load area (120) where the container and the holder are loaded; a processing area (130) where the holder is dipped into the reagent within the container using the end effector and rotated to chemically process the semiconductor specimen; a rinsing area (140) where the holder and the semiconductor specimen are rinsed using the gripper connected to the end effector; and a drying area (150) where the holder and the semiconductor specimen are dried using the gripper connected to the end effector. A corresponding method for testing a semiconductor specimen is also disclosed.