Rod-Shaped Extraction Electrode Optics for Ion Implantation
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Solution Overview
Problem
Conventional ion implantation systems face high maintenance costs and performance degradation due to wear of extraction electrode optics from ion beam sputtering, leading to variations in beam transport and optics.
Innovation Solution
The use of rod-shaped optical elements for extraction electrodes, which can be easily replaced and maintained, reducing system maintenance costs and preserving ion beam transport characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional solid plate extraction electrodes are used, then ion beam extraction and focusing is achieved, but maintenance costs increase and performance degrades due to sputtering wear
Solution Approach 1:
The extraction electrode is divided into multiple rod-shaped elements arranged in an array, where each rod is a separate replaceable component. This segmentation allows individual rods to be replaced without replacing the entire electrode assembly, reducing maintenance costs and complexity while maintaining reliable ion beam extraction and focusing performance.
Solution Approach 2:
The rod-shaped extraction electrode elements are designed as inexpensive, easily replaceable components that can withstand sputtering wear. When rods become worn, they are simply replaced with new rods rather than requiring expensive repairs or replacement of the entire electrode system, effectively treating them as disposable elements that maintain system reliability.
2Ease of repair
If rod-shaped optical elements are used, then maintenance costs are reduced and replacement is easier, but manufacturing and positioning precision must be maintained
Solution Approach 1:
By segmenting the electrode into standardized rod elements with simple geometries, the manufacturing precision requirements for each individual rod are reduced compared to complex solid plate electrodes. The rods can be manufactured with simpler tolerances and then precisely positioned as modular units in the array configuration.
Solution Approach 2:
The rod-shaped elements serve multiple functions: they provide ion beam extraction, focusing, and can be configured in different patterns by arranging the rods. This universal design allows the same basic rod component to fulfill multiple optical functions, reducing the need for highly specialized precision manufacturing of different electrode types.
3Stability of the object's composition
If extraction electrodes are replaced frequently to maintain performance, then ion beam stability is preserved, but system downtime and operational costs increase
Solution Approach 1:
The segmented rod design enables rapid replacement of individual worn rods during scheduled maintenance without requiring complete system shutdown or complex reassembly. This maintains ion beam stability by allowing timely replacement of degraded elements while minimizing system downtime and preserving operational efficiency.
Solution Approach 2:
By using inexpensive, easily replaceable rod elements, the system can maintain optimal ion beam stability through regular replacement of worn rods without significant operational cost or downtime penalties. The low cost and simplicity of rod replacement make frequent maintenance feasible, preserving beam stability while minimizing productivity impact.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a cost-effective ion implantation system with reduced maintenance costs and improved ion beam stability, maintaining uniformity and preventing particle contamination at the workpiece.
Implementation Method 1
The ionization process is effected by an electron beam, which may take the form of a thermionic emitter such as a thermally heated filament, or a radio frequency (RF) antenna
Implementation Method 2
A thermionic emitter is typically electrically biased so that emitted electrons gain sufficient energy to ionize
Implementation Method 3
an extraction system extracts the ionized source gas in the form of an ion beam
Implementation Method 4
wear of extraction electrode optics from ion beam sputtering
Data Source
AI summary
An electrode apparatus for an ion implantation system has a base plate having a base plate aperture and at least one securement region. A securement apparatus is associated with each securement region, and a plurality of electrode rods are selectively coupled to the base plate by the securement apparatus. The plurality of electrode rods have a predetermined shape to define an optical region that is associated with the base plate aperture. An electrical coupling electrically connects to the plurality of electrode rods and is configured to electrically connect to an electrical potential. The plurality of electrode rods have a predetermined shape configured to define a path of a charged particle passing between the plurality of electrode rods based on the electrical potential. The plurality of electrode rods can define a suppressor or ground electrode downstream of an extraction aperture of an ion source.