Electron Microscope ROI Tracking With Dynamic Drift Correction

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Solution Overview

Problem

Existing electron microscopy systems struggle to accurately track and correct for drift in samples undergoing dynamic changes, such as in in-situ studies, due to the magnitude and rate of movement exceeding the capabilities of current camera and detector systems, leading to challenges in maintaining sharp images and aligning measurements with original coordinates.

Innovation Solution

A control system for electron microscopy that registers and adjusts the view to dynamically center and focus on a region of interest, incorporating X, Y, Z translations and tilts, and applies in-situ stimuli to correct for drift, using a combination of magnitude and direction elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If digital field of view shifting is used to correct for sample movement, then image sharpness is improved, but the method fails when movement magnitude exceeds camera/detector capabilities

Engineering Contradiction:
Improveimage sharpnessVSAvoidcapability to handle large movements
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent implements dynamic drift correction by continuously tracking sample movement and adjusting the field of view in real-time. The system transitions from static digital shifting to a dynamic approach where the field of view automatically follows sample features, enabling adaptation to varying movement magnitudes and rates during in-situ experiments.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system employs feedback mechanisms by monitoring sample position continuously and using this information to adjust the field of view. The drift correction system receives feedback about sample movement from tracking algorithms and responds by dynamically repositioning the field of view to maintain the region of interest within the detection area.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If manual tracking and correction methods are used, then measurement accuracy is maintained, but operational complexity and expertise requirements increase

Engineering Contradiction:
Improvecoordinate alignment accuracyVSAvoiduser intervention requirement
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The drift correction system operates autonomously by automatically tracking sample features and adjusting the field of view without user intervention. The system services itself by implementing closed-loop control where the software automatically calculates drift corrections and applies them, eliminating the need for manual tracking while maintaining measurement accuracy.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system performs preliminary tracking and drift calculation actions automatically before measurements are taken. By pre-establishing the relationship between sample features and detector coordinates and continuously updating this relationship, the system prepares the measurement system in advance, ensuring accurate coordinate alignment is maintained throughout the experiment without requiring manual intervention during data collection.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS12375815B2Automated application of drift correction to sample studied under electron microscope
Publication Date: 2025.07.29 PROTOCHIPS INC
  • US12375815B2 patent drawing
  • US12375815B2 patent drawing
  • US12375815B2 patent drawing

AI summary

Control system configured for sample tracking in an electron microscope environment registers a movement associated with a region of interest located within an active area of a sample under observation with an electron microscope. The registered movement includes at least one directional constituent. The region of interest is positioned within a field of view of the electron microscope. The control system directs an adjustment of the electron microscope control component to one or more of dynamically center and dynamically focus the view through the electron microscope of the region of interest. The adjustment comprises one or more of a magnitude element and a direction element.