Roll Brush Substrate Cleaning with Vibration Sensor Feedback

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Solution Overview

Problem

Existing substrate cleaning apparatuses using rotating cleaning brushes face inefficiencies due to unpredictable cleaning states and deviations, leading to incomplete removal of foreign substances, with prior solutions like plane-shaped brushes offering low cleaning efficiency and requiring re-cleaning without guarantee of proper results.

Innovation Solution

A substrate cleaning apparatus equipped with a roll-shaped cleaning brush and a vibration sensor to predict cleaning state anomalies before completion, sending warnings or stopping the process to prevent defective cleaning and adjusting the substrate's posture for optimal contact, thereby enhancing cleaning efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a roll-shaped cleaning brush is used to clean the substrate, then the cleaning efficiency is improved, but the cleaning state deviates and becomes unpredictable

Engineering Contradiction:

Improvecleaning efficiencyVSAvoidcleaning state consistency

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The vibration sensor detects vibrations generated during the cleaning process, and the control unit receives this information to determine whether the cleaning state is normal or abnormal. This feedback mechanism allows real-time monitoring and adjustment of the cleaning process, ensuring consistent cleaning quality while maintaining high efficiency.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces visual inspection or camera-based detection with a vibration sensor that detects mechanical vibrations during cleaning. This substitution enables more reliable and real-time detection of cleaning state, improving consistency without sacrificing the efficiency benefits of the roll-shaped brush.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Speed

If the cleaning process continues without monitoring, then the processing speed is maintained, but defective cleaning occurs and requires re-cleaning

Engineering Contradiction:

Improvecleaning process speedVSAvoidcleaning quality

Core Design Contradiction:

SpeedVSManufacturing precision

Solution Approach 1:

The vibration sensor detects cleaning state abnormalities during the cleaning process, allowing the system to identify defective cleaning before it is completed. The control unit can then stop the cleaning process early, preventing waste of time and resources on substrates that will not be properly cleaned.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

Real-time vibration monitoring provides feedback on cleaning quality, enabling the system to maintain high speed operation while ensuring cleaning precision through continuous detection and early intervention when anomalies are detected.

Inventive Principle:

Principle #23Feedback

3Measurement precision

If visual inspection or camera is used to check substrate status, then the cleaning state can be confirmed, but the inspection time delays the overall process

Engineering Contradiction:

Improvecleaning state detection accuracyVSAvoidinspection time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces time-consuming visual inspection or camera-based detection with vibration sensor monitoring that provides real-time feedback during the cleaning process. This eliminates the need for separate inspection steps, maintaining high measurement precision while eliminating time delays.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The vibration detection occurs continuously during the cleaning process itself, rather than as a separate post-cleaning inspection step. This integration ensures that cleaning state monitoring does not interrupt or delay the cleaning workflow, maintaining both accuracy and efficiency.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus reliably achieves normal cleaning by predicting and correcting substrate posture, reducing defective cleaning time and increasing overall cleaning efficiency, ensuring more substrates are properly cleaned per unit time.

Implementation Method 1

a vibration sensor installed on the brush unit to detect vibrations generated by the contact of the cleaning brush with the substrate

Methodology Applied

Scientific EffectVibration: Vibration

Data Source

PatentUS20230398580A1Substrate cleaning apparatus

Publication Date: 2023.12.14 KC TECH CO LTD

AI summary

Provided is a substrate cleaning apparatus, comprising: a substrate support unit for rotating and holding a substrate; a brush unit for cleaning the substrate with a cleaning brush formed in the form of a roll and rotating in contact with a surface of the substrate; and a vibration sensor installed on the brush unit to detect vibrations generated by the contact of the cleaning brush with the substrate, thereby improving process efficiency by predicting cleaning results before cleaning is completed.