Substrate cleaning apparatus and substrate processing apparatus

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Solution Overview

Problem

Conventional substrate cleaning apparatuses require manual and time-consuming adjustments to correct the inclination of roll cleaning members, which disrupts the cleaning process and affects the accuracy of roll load measurements.

Innovation Solution

Incorporating an inclination sensor and an inclination correction device that automatically adjusts the roll cleaning member's rotation axis to be parallel to the substrate or cleaning surface before contact, using a tilt mechanism and expanding/contracting cylinder device to ensure proper alignment and uniform contact.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual adjustment of roll cleaning member inclination is performed, then the inclination can be corrected, but the adjustment process becomes time-consuming and disrupts the cleaning process

Engineering Contradiction:

Improveroll load measurement accuracyVSAvoidadjustment time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces manual mechanical adjustment with an automated inclination correction device that uses a cylinder to tilt the roll cleaning member. This substitution eliminates time-consuming manual operations while maintaining precise inclination control, directly resolving the contradiction between measurement accuracy and adjustment time.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The inclination sensor automatically detects the roll cleaning member's inclination and feeds this information to the control device, which then activates the correction mechanism. This self-service system eliminates the need for external manual intervention, reducing adjustment time while ensuring accurate roll load measurements through continuous monitoring and correction.

Inventive Principle:

Principle #25Self-service

2Manufacturing precision

If manual adjustment of roll cleaning member inclination is performed, then the inclination can be corrected, but the cleaning process is disrupted

Engineering Contradiction:

Improvecleaning uniformityVSAvoidcleaning process continuity

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The automated inclination correction device using a cylinder mechanism replaces manual adjustment operations, enabling precise inclination control without interrupting the cleaning process. This maintains cleaning uniformity while preserving process continuity, resolving the contradiction between manufacturing precision and productivity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs preliminary inclination detection and correction before the roll cleaning member contacts the substrate. By pre-adjusting the inclination to the optimal position, the system ensures uniform cleaning performance without disrupting the ongoing cleaning process, thereby maintaining both precision and productivity.

Inventive Principle:

Principle #10Preliminary action

3Productivity

If the roll cleaning member inclination is not corrected, then the cleaning process continues without interruption, but the roll load measurement accuracy deteriorates

Engineering Contradiction:

Improvecleaning process continuityVSAvoidroll load measurement accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The inclination sensor continuously monitors the roll cleaning member's inclination and provides feedback to the control device. This feedback mechanism enables real-time detection of inclination deviations and triggers automatic correction, ensuring accurate roll load measurements are maintained without interrupting the cleaning process continuity.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The automated cylinder-based correction system replaces manual adjustment, providing continuous inclination control that maintains measurement accuracy while preserving process continuity. The mechanical substitution enables uninterrupted operation with sustained precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration simplifies and accelerates the adjustment process, improves cleaning performance by ensuring uniform roll load application, and enhances measurement accuracy of the roll load.

Implementation Method 1

an inclination sensor detecting the inclination of the roll cleaning member

Methodology Applied

Scientific EffectGravitation: Gravitation

Implementation Method 2

an expanding and contracting cylinder device disposed between the roll holder and the arm

Methodology Applied

Scientific EffectHydraulic pressure: Hydraulic Press

Data Source

PatentUS10575697B2Substrate cleaning apparatus and substrate processing apparatus

Publication Date: 2020.03.03 EBARA CORP

AI summary

Various examples of a substrate cleaning apparatus and a substrate processing apparatus are described in the present disclosure. One example of the present invention is a substrate cleaning apparatus including a roll cleaning member cleaning a substrate, an inclination sensor detecting an inclination of the roll cleaning member, and an output device outputting a detection result of the inclination sensor.