Roll Cleaning Module for Substrate Cleaning Device
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Solution Overview
Problem
Existing substrate cleaning devices face challenges in effectively removing abrasive residues and contaminants from roll members, which can lead to deterioration of cleaning efficiency and reverse contamination between roll members, affecting the overall cleaning process.
Innovation Solution
A substrate cleaning device with a roll cleaning module that includes a processing tank with ultrasonic vibrations and a brush pad for cleaning roll members, along with a control unit to manage the movement and contact of roll members with the substrate surfaces, ensuring thorough cleaning and preventing reverse contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If roll members are used for scrub cleaning substrate surfaces, then cleaning ability is improved, but abrasive residues accumulate on roll members causing deterioration of cleaning effect
Solution Approach 1:
The system performs preliminary cleaning actions on the roll members by detecting abrasive residues and automatically initiating cleaning processes (ultrasonic cleaning, brush cleaning, or solvent injection) before the roll members can transfer contaminants to substrates, thereby maintaining cleaning effectiveness throughout operation
Solution Approach 2:
The detection unit continuously monitors the roll members for abrasive residues and provides feedback to the control unit, which automatically adjusts the cleaning process accordingly, creating a closed-loop system that maintains optimal cleaning performance
2Area of stationary object
If multiple roll members are used for cleaning, then cleaning coverage is improved, but reverse contamination between roll members occurs
Solution Approach 1:
The system extracts and removes abrasive residues from roll members through dedicated cleaning mechanisms (ultrasonic cleaning tank, brush cleaning unit, or solvent injection), separating the contaminants from the roll members to prevent reverse contamination between multiple roll members
Solution Approach 2:
The detection unit acts as an intermediary that monitors each roll member and triggers appropriate cleaning actions, while the cleaning units serve as intermediary systems that process the roll members between their use on different substrate surfaces, preventing direct contamination transfer
3Device complexity
If manual cleaning of roll members is performed, then device complexity is reduced, but cleaning efficiency deteriorates and productivity decreases
Solution Approach 1:
The system performs self-service cleaning through automated detection and cleaning mechanisms that operate without manual intervention, with the detection unit automatically identifying contaminants and the cleaning units autonomously removing them, thereby maintaining high cleaning efficiency while minimizing operational complexity
Solution Approach 2:
The system automatically performs preliminary cleaning actions by detecting abrasive residues and initiating appropriate cleaning processes without requiring manual intervention, maintaining high productivity while keeping the system relatively simple
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances cleaning efficiency by effectively removing contaminants from roll members and preventing reverse contamination, thereby improving the overall cleaning performance and maintaining the cleanliness of the substrate surfaces.
Implementation Method 1
an ultrasonic generating unit configured to apply ultrasonic vibrations to the first cleaning solution supplied to the roll receiving region
Data Source
AI summary
A substrate cleaning device, includes: a substrate cleaning module including first and second roll members adjacent to lower and upper surfaces of a substrate, respectively, first and second driving units configured to move the first and second roll members, a first roll cleaning module including a roll receiving region, a first cleaning solution supply unit supplying a first cleaning solution, and an ultrasonic generating unit applying ultrasonic vibrations; a second roll cleaning module including a housing, a brush pad in the housing, and a second cleaning solution supply unit supplying a second cleaning solution; and a control unit controlling the first driving unit so that the first roll member contacts the substrate lower surface or is accommodated in the roll receiving region, and to control the second driving unit so that the second roll member contacts the substrate upper surface or is seated on the brush pad.