Roll Cleaning Member Support With Radial Backflow Prevention

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Solution Overview

Problem

Existing support mechanisms for roll cleaning members suffer from significant leakage of cleaning solution to the mechanism side, which reduces the effectiveness of substrate cleaning and self-cleaning, and existing solutions to mitigate this leakage are either inefficient or increase device complexity and cost.

Innovation Solution

A support mechanism featuring a nozzle body, a cover that rotates with the roll cleaning member, and a bearing, with a backflow prevention wall extending radially to hinder the flow of cleaning solution back into the mechanism, reducing leakage and preventing particle contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the supply flow rate of cleaning solution is increased to improve cleaning performance, then cleaning effectiveness is improved, but cleaning solution leakage to mechanism side increases

Engineering Contradiction:
Improvecleaning performanceVSAvoidcleaning solution leakage
Core Design Contradiction:
ProductivityVSLoss of substance

Solution Approach 1:

The backflow prevention wall is installed in advance to counteract the backflow tendency of cleaning solution before it can leak into the mechanism side. The wall creates a physical barrier that prevents the reverse flow of cleaning solution, thereby resolving the contradiction between maintaining high cleaning performance and preventing cleaning solution loss.

Inventive Principle:
Principle #9Preliminary anti-action

2Loss of substance

If existing leakage reduction methods are applied, then cleaning solution leakage is reduced, but device complexity or cost increases

Engineering Contradiction:
Improvecleaning solution leakageVSAvoidstructure complexity
Core Design Contradiction:
Loss of substanceVSDevice complexity

Solution Approach 1:

The backflow prevention wall divides the support mechanism's internal space into two distinct regions: a clean region where cleaning solution is supplied to the roll cleaning member, and a mechanism region where the bearing and other components are located. This segmentation prevents mixing between cleaning solution and mechanism components, reducing leakage without adding complex sealing systems or multiple moving parts.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The backflow prevention wall is implemented as a simple, inexpensive structural feature that can be integrated into the existing nozzle body or cover design. Rather than using complex mechanical seals or expensive sealing components, the wall provides an effective and economical solution to the leakage problem.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The backflow prevention wall effectively reduces cleaning solution leakage to the mechanism side by up to 50% compared to existing designs, while maintaining operational efficiency and avoiding increased device size or cost.

Implementation Method 1

a backflow prevention wall extending in a radial direction with respect to a rotation axis of the roll cleaning member is provided in at least one of the nozzle body and the cover

Methodology Applied
Scientific EffectBackflow prevention:

Data Source

PatentUS20250214116A1Support mechanism for roll cleaning member and cleaning device
Publication Date: 2025.07.03 EBARA CORP
  • US20250214116A1 patent drawing
  • US20250214116A1 patent drawing
  • US20250214116A1 patent drawing

AI summary

A support mechanism for a roll cleaning member includes: a nozzle body that has a pipe connection port to which a cleaning solution supply pipe is connected and a discharge port from which a cleaning solution is discharged; a cover that is engaged with the roll cleaning member and rotates together with the roll cleaning member; and a bearing that is housed between the nozzle body and the cover. A backflow prevention wall extending in a radial direction with respect to a rotation axis of the roll cleaning member is provided in at least one of the nozzle body and the cover.