Integrated Roll and Plasma Cleaning System for Nanometer Contaminants
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Solution Overview
Problem
Current systems for cleaning the surfaces of objects, such as LCD panels, are unable to effectively remove contaminants down to the nanometer scale, specifically organic chemical conglomerations like oligomers, in addition to inorganic particles, which can degrade image quality.
Innovation Solution
A system comprising a roll cleaner with elastomeric and adhesive rolls to remove inorganic contaminants, combined with an atmospheric plasma cleaner that uses a sealed chamber and high-voltage electrodes to remove organic contaminants, ensuring both types of contaminants are removed down to tens of nanometers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a roll cleaner is used to remove inorganic contaminants, then inorganic particle removal is effective, but organic contaminants like oligomers cannot be removed
Solution Approach 1:
The patent combines a roll cleaner and an atmospheric plasma cleaner into a single integrated cleaning system. The roll cleaner removes inorganic contaminants through mechanical action, while the plasma cleaner removes organic contaminants through plasma chemistry. By merging these two distinct cleaning mechanisms in sequence, the system achieves comprehensive removal of both inorganic and organic contaminants from the web surface.
2Adaptability or versatility
If atmospheric plasma cleaner is used to remove organic contaminants, then organic contaminant removal is effective, but the system cannot remove inorganic particles
Solution Approach 1:
The integrated cleaning system merges a roll cleaner and an atmospheric plasma cleaner in sequence. The roll cleaner first removes inorganic particles through mechanical rolling action, then the atmospheric plasma cleaner follows to remove organic contaminants. This sequential merging ensures both inorganic and organic contaminants are effectively removed without compromising either cleaning function.
3Manufacturing precision
If separate cleaning systems are used for inorganic and organic contaminants, then each contaminant type can be removed effectively, but the device complexity increases
Solution Approach 1:
The patent merges separate cleaning functions into a single integrated system where the roll cleaner and plasma cleaner are positioned in sequence to treat the web surface. This consolidation reduces the need for separate, independent cleaning systems while maintaining effective removal of both inorganic and organic contaminants, thereby reducing overall device complexity.
Solution Approach 2:
The integrated cleaning system performs multiple cleaning functions within a single apparatus. The roll cleaner handles inorganic particle removal while the plasma cleaner handles organic contaminant removal, creating a universal cleaning system that addresses multiple contaminant types without requiring separate specialized systems for each.
4Measurement precision
If conventional cleaning systems are used, then inorganic particles can be removed to micron level, but nanometer scale contaminants remain
Solution Approach 1:
The atmospheric plasma cleaner changes the cleaning mechanism from mechanical (micron-level) to plasma-based chemical action that can effectively remove contaminants at the nanometer scale. The plasma state allows for removal of organic contaminants like oligomers that are too small to be effectively removed by conventional mechanical rolling, thereby extending the effective cleaning range down to nanometer dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively cleans both organic and inorganic contaminants from surfaces down to the nanometer scale, ensuring high image quality by integrating the roll cleaner and atmospheric plasma cleaner for comprehensive contamination removal.
Implementation Method 1
A plasma cleaner generates a plasma through air ionization and passes a material surface through the plasma
Implementation Method 2
A plasma cleaner generates a plasma through air ionization and passes a material surface through the plasma, which effectively vaporizes or tears apart the oligomers or other organic contaminants
Implementation Method 3
at least one electrode disposed in the chamber and receiving a high voltage to generate a plasma applied to the first surface of the object
Data Source
Figure 1
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Figure 4
AI summary
A system (10) for cleaning an object (12) includes a roll cleaner (14) having a rotatable elastomeric roll (20) with a cylindrical outer surface configured to contact the first surface of the object (12), a rotatable adhesive roll (22) with a cylindrical outer surface contacting a portion of the outer surface of the elastomeric roll (20), and a support (24). The object (12) passes between the elastomeric roll (20) and the support (24), which contacts a second, opposing object surface. An atmospheric plasma cleaner (16) includes a sealed chamber (32) and at least one electrode (34) disposed in the chamber (32) and receiving a high voltage to generate a plasma applied to the first object surface. At least a portion of an inlet of the plasma cleaner (16) is formed by the elastomeric roll (20) and the support (24), and the contacting of the first and second surfaces of the object (12) by the elastomeric roll (20) and the support (24) seals the inlet of the plasma cleaner (16).