Roll-to-roll imprint lithography purging system
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Solution Overview
Problem
Existing nano-fabrication techniques, such as imprint lithography, face challenges in maintaining pattern fidelity for features smaller than 100 nm and achieving uniform pressure, leading to distorted patterns due to uneven pressure distribution.
Innovation Solution
A system and method for patterning polymerizable material using a contact system that moves smoothly across a template, coupled with a gas purging system to maintain uniformity and a film sheet supported by rollers and pulleys, allowing for precise control and continuous patterning with multiple templates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a stationary template is used in conventional imprint lithography, then pattern formation is achieved, but uniform pressure distribution is difficult to maintain and pattern fidelity deteriorates for features smaller than 100 nm
Solution Approach 1:
The patent applies the dynamics principle by replacing the stationary template with a moving template that travels along with the polymerizable material. This dynamic approach ensures continuous contact between the template and material, maintaining uniform pressure distribution throughout the patterning process and preventing the distortion that occurs with stationary templates. The moving template continuously adapts to the material's position, ensuring consistent pressure application across the entire patterning area.
Solution Approach 2:
The patent implements continuity of useful action through the moving template that maintains constant contact with the polymerizable material throughout its movement. This continuous interaction ensures uninterrupted pressure application and pattern formation, eliminating the start-stop pressure variations that occur with stationary templates. The template moves continuously along the material, ensuring every portion receives uniform treatment.
2Productivity
If conventional imprint lithography is used, then patterning is achieved, but production yield decreases due to distorted patterns
Solution Approach 1:
The moving template dynamically follows the polymerizable material, ensuring continuous and uniform pressure distribution throughout the patterning process. This dynamic approach eliminates the distorted patterns that lead to production yield losses, thereby improving both pattern accuracy and production yield simultaneously.
3Ease of operation
If the template remains stationary, then the setup is simple, but the contact system cannot provide smooth fluid front progression
Solution Approach 1:
The patent applies dynamics by making the template movable rather than stationary. This enables the contact system to smoothly follow the fluid front progression of the polymerizable material, ensuring uniform contact and pressure distribution. The moving template adapts to the material's movement, providing smooth and controlled patterning that would be impossible with a stationary setup.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the formation of precise patterns with improved fidelity and uniform pressure distribution, enhancing the ability to create features smaller than 100 nm and increasing production yields in nano-fabrication processes.
Implementation Method 1
A gas purging system is provided within the open area that provides gas at the fluid front
Implementation Method 2
The polymerizable material is solidified to form a patterned layer
Data Source
AI summary
Droplets of polymerizable material may be patterned on a film sheet using a roll-to-roll system. The droplets of polymerizable material may be dispensed on the film sheet such that a substantially continuous patterned layer may be formed on the film sheet. A contact system provides for smooth fluid front progression the polymerizable material during imprinting. A gas purging system may be positioned during imprinting. Gas purging systems may provide for purging in parallel as fluid front of polymerizable material moves through roll-to-roll system.