Roll Conveyor Roller Thermal Control for Deposition Buildup
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Solution Overview
Problem
In thin film deposition, the accumulation of material on rollers in a roll conveyor leads to increased roller diameter, reducing equipment uptime and efficiency due to deposition material buildup, which existing technologies have not effectively addressed.
Innovation Solution
A vapor deposition system with a roll conveyor featuring a large diameter roller, a heating element, and an overspray collector to minimize deposition on the roller, along with a method that includes introducing a material and carrier gas into a chamber, vaporizing the material, and directing the vapor toward a substrate while capturing stray flux to prevent buildup.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a roller is used in the deposition system, then substrate transport is enabled, but deposition material accumulates on the roller surface causing diameter increase and reduced function
Solution Approach 1:
The patent replaces the mechanical cleaning approach with a thermal field approach by introducing a heating element that maintains the roller surface temperature above the condensation temperature of deposition material, preventing material accumulation through thermal energy rather than mechanical removal
Solution Approach 2:
The patent changes the temperature parameter of the roller surface by introducing a heating element that maintains the roller temperature above the condensation point of deposition material, transforming the roller from a passive mechanical component to an actively temperature-controlled component that prevents deposition through thermal parameter control
2Productivity
If deposition material accumulates on the roller, then the roller diameter increases, but this reduces equipment uptime and requires frequent cleaning
Solution Approach 1:
The patent applies preliminary action by maintaining the roller surface temperature above the condensation temperature of deposition material throughout the deposition process, preventing material accumulation before it can occur rather than requiring subsequent cleaning operations
Solution Approach 2:
The heating element operates continuously during the deposition process to maintain the roller surface temperature above the condensation point, ensuring continuous prevention of deposition material accumulation and eliminating intermittent cleaning interruptions
3Reliability
If the roller diameter is increased to reduce deposition accumulation, then the roller becomes wider than the substrate, but this creates structural complexity
Solution Approach 1:
The patent changes the temperature parameter of the roller surface rather than the geometric parameter (diameter), maintaining the roller dimensions matched to the substrate while preventing deposition through thermal control, thus avoiding structural complexity associated with oversized rollers
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively minimizes the accumulation of deposition material on rollers, maintaining a consistent roller diameter and extending the duration between cleaning events, thereby maximizing equipment uptime and efficiency.
Implementation Method 1
A roller can be hollow. A heating element can be positioned inside a hollow roller
Implementation Method 2
A deposition source can include a vapor deposition source
Implementation Method 3
heating the material such that a portion of the material vaporizes into a vapor, directing a mixture of the vapor and carrier gas toward a surface of a substrate having a temperature lower than the vapor, such that the vapor condenses on the substrate as a film
Data Source
AI summary
A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.