Roller-Type Depressing Device Uniform Pressure Distribution
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Solution Overview
Problem
Conventional roller-type depressing devices experience uneven elastic deformation when supported by a backup roller, leading to non-uniform pressure application on objects due to the elastic material's deformation, which affects the transfer of micropatterns in nano-imprinting technologies.
Innovation Solution
A roller-type depressing device that includes a main roller with an elastic surface, supported by an intermediate roller with a higher elastic modulus and a backup roller shorter in the axial direction, along with a pressure adjusting unit using fluid pressure differences to ensure uniform pressure application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the main roller is elongated to increase the transfer area, then the transfer area is improved, but the depress force around the center decreases relative to depress forces at both ends
Solution Approach 1:
A backup roller is introduced as an intermediary component to support the elongated main roller at its center portion. This mediator prevents the main roller from bending under its own weight and the applied load, ensuring uniform depress force across the entire transfer area while maintaining the increased length for larger transfer area.
2Force
If the main roller is supported by a backup roller to maintain depress force, then the depress force uniformity is improved, but uneven elastic deformation occurs in the elastic material
Solution Approach 1:
An intermediate roller made of rigid material (metal or ceramics) is introduced as a mediator between the elastic main roller and the backup roller. This intermediate roller distributes the support force from the backup roller uniformly across the main roller, preventing localized elastic deformation while maintaining the necessary depress force uniformity.
Solution Approach 2:
The elastic modulus of the supporting structure is changed by introducing the intermediate roller made of rigid material (metal or ceramics) between the elastic main roller and the backup roller. This parameter change in material stiffness prevents excessive elastic deformation of the main roller while maintaining uniform depress force.
3Force
If the main roller is made of elastic material to ensure uniform depress force, then the depress force uniformity is improved, but uneven elastic deformation occurs when supported at both ends
Solution Approach 1:
The intermediate roller acts as a mediator that distributes the load from the backup roller to the main roller, preventing uneven elastic deformation. This ensures that the elastic material maintains its shape and provides uniform depress force, thereby ensuring high pattern transfer precision.
Solution Approach 2:
The backup roller and intermediate roller are positioned beforehand to provide support and prevent uneven elastic deformation of the main roller before the imprinting process begins. This prior cushioning ensures that the main roller maintains uniform depress force throughout the operation, preventing pattern transfer errors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses uneven elastic deformation, allowing for uniform pressure distribution and improved pattern transfer in nano-imprinting by using the intermediate roller to stabilize the main roller and the backup roller to maintain axial direction pressure uniformity.
Implementation Method 1
when the main roller is supported by the backup roller, the supported elastic material causes an uneven elastic deformation
Implementation Method 2
an intermediate roller which has at least a surface formed of a material that has a larger elastic modulus than the elastic material
Implementation Method 3
a pressure adjusting plate holder that holds the pressure adjusting plate so as to apply force to the main roller, the force produced by a pressure difference in fluid applied to both surfaces of the pressure adjusting plate
Data Source
AI summary
A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.