Rolling Contactor for Semiconductor Test UPH

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Solution Overview

Problem

The mechanical contact between semiconductor devices and contactors in testing apparatuses is inefficient due to the need for precise vertical movements, which significantly increases the index time and affects the unit per hour (UPH) rate.

Innovation Solution

A rolling contactor with a first cylindrical rotatable holder and multiple test pin sets, each connected to the holder and comprising a plurality of test pins, is used to successively contact the semiconductor devices. This design allows for a rotating movement of the holder to establish contact, reducing the mechanical movement time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If vertical movement of the chuck is used to establish mechanical contact, then precise contact can be achieved, but the index time increases significantly

Engineering Contradiction:
Improvecontact precisionVSAvoidindex time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent transforms the static vertical movement mechanism into a dynamic rotational system. The contactor rotates to bring test pins into contact with semiconductor devices, replacing the traditional vertical chuck movement. This dynamic approach allows continuous rotation and contact establishment without the need for repeated vertical positioning, significantly reducing index time while maintaining contact precision through controlled rotational movement.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent substitutes the vertical mechanical movement system with a rotational mechanical system. Instead of moving the chuck vertically to establish contact, a contactor rotates horizontally to bring test pins into contact with devices. This substitution changes the fundamental mechanical approach from linear vertical motion to rotational horizontal motion, reducing the complexity and time of index operations.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If larger strip/panel/wafer and higher test parallelism are used, then test capacity increases, but the handling mechanism becomes heavier and slower

Engineering Contradiction:
Improvetest parallelismVSAvoidhandling speed
Core Design Contradiction:
ProductivityVSSpeed

Solution Approach 1:

The patent divides the handling system into multiple independent contactors, each capable of rotating and contacting devices independently. Instead of one heavy mechanism handling all devices, multiple lighter contactors work in parallel. Each contactor manages a subset of devices, reducing the weight and inertia of individual handling mechanisms while maintaining high overall test capacity through parallel operation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces rotational dynamics to the handling mechanism, allowing contactors to rotate and engage devices continuously. This dynamic rotational approach replaces slow linear movement with faster rotational motion, enabling the handling mechanism to service multiple devices in sequence without the heavy acceleration and deceleration cycles required by vertical movement systems.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS12282060B2Apparatus for testing semiconductor devices and a rolling contactor for use in such an apparatus
Publication Date: 2025.04.22 INFINEON TECHNOLOGIES AG
  • US12282060B2 patent drawing
  • US12282060B2 patent drawing
  • US12282060B2 patent drawing

AI summary

An apparatus for testing semiconductor devices is disclosed. In one example, the apparatus includes a rolling contactor comprising a first cylindrical rotatable holder, a plurality of test pin sets, each one of the test pin sets being connected to the cylindrical rotatable holder. Each one of the test pin sets comprises a plurality of test pins, and a substrate configured to support a plurality of semiconductor devices. The semiconductor devices comprising one or more contact elements on a main surface thereof remote from the substrate, wherein the first cylindrical rotatable holder and the substrate are arranged relative to each other so that due to a rotating movement of the first cylindrical rotatable holder the test pins of the test pin sets are successively contacted with the contact elements of the semiconductor devices.