Rolling Diaphragm Surface Structure for Low-Particle Bending
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Solution Overview
Problem
Resin members used in diaphragms and bellows, which repeatedly bend in applications like semiconductor production, generate particles due to surface deterioration, leading to production defects as these particles are transferred with chemical solutions.
Innovation Solution
A resin member with a liquid contact surface that has a surface roughness less than 0.40 μm and a total light reflectance of at least 2.0%, featuring a cross-sectional shape with alternately continuous recesses and projections formed by concave curved surfaces and sharp ends, reducing stress and particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If the resin member is repeatedly bent during use, then the flexibility and functional performance are maintained, but particles are generated from the liquid contact surface due to surface deterioration
Solution Approach 1:
The invention changes the surface parameters of the liquid contact surface by controlling surface roughness (Ra ≤ 0.40 μm) and light reflectance (≥ 2.0%). These parameter modifications make the surface more resistant to deterioration during repeated bending, thereby reducing particle generation while maintaining the flexibility needed for continuous operation.
Solution Approach 2:
The invention applies preliminary surface treatment to form a specific surface structure (with recesses and projections) and control surface properties (roughness and reflectance) before the resin member enters service. This preliminary preparation prevents particle generation during subsequent repeated bending operations by creating a surface that resists deterioration from the outset.
2Object-generated harmful factors
If the surface roughness is decreased to inhibit particle generation, then the surface becomes smoother and less prone to abrasion, but the manufacturing precision requirements increase
Solution Approach 1:
The invention specifies a quantitative parameter range for surface roughness (Ra ≤ 0.40 μm) and light reflectance (≥ 2.0%) that balances particle generation prevention with manufacturability. This parameter specification provides clear manufacturing targets that achieve the anti-particle effect without requiring excessively tight tolerances that would make production impractical.
Solution Approach 2:
The invention introduces a specific surface topology with recesses and projections having predetermined shapes. This structured surface geometry, when combined with the controlled roughness parameter, creates a surface that is both manufacturable and effective at preventing particle generation through reduced abrasion during bending.
3Object-generated harmful factors
If the total light reflectance is increased to reduce particle generation, then the surface properties are optimized for durability, but the surface structure complexity increases
Solution Approach 1:
The invention uses light reflectance (≥ 2.0%) as a measurable parameter to characterize and control surface properties. This optical parameter provides a straightforward way to specify and verify surface quality without requiring complex structural features, simplifying both manufacturing and quality control while effectively reducing particle generation.
Solution Approach 2:
The invention applies local surface treatment to create recesses and projections with specific geometries at the liquid contact surface. This localized structural modification, combined with overall surface roughness and reflectance control, optimizes particle resistance at the critical bending regions without unnecessarily complicating the entire component structure.
Data Source
AI summary
A resin member capable of inhibiting generation of particles due to repeated bending thereof is provided. A rolling diaphragm 5 composed of a resin member has one surface formed as a liquid contact surface 37a, repeatedly bends when used, and has flexibility. A surface roughness of the liquid contact surface 37a at a portion 371 that bends is less than 0.40 μm as an arithmetic average roughness, and a total light reflectance of the liquid contact surface 37a at the portion 371 that bends is not less than 2.0%.