Rolling Member Support Assembly for Immersion Exposure Tube Wear
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Solution Overview
Problem
The frequent wear and tear of flexible tubes in immersion exposure apparatuses due to indirect contact with underlying platforms leads to increased replacement costs and time, as they move back and forth during operation, affecting the efficiency and longevity of these semiconductor fabrication tools.
Innovation Solution
A supporting assembly comprising a first and second supporting rod with parallel recesses and a bridging member, which receives the tubes, allowing them to be supported without direct contact with the platform, thereby reducing friction and extending their lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If flexible tubes are used to transport liquid in immersion exposure apparatus, then liquid transport function is achieved, but the tubes wear out due to friction with the underlying platform
Solution Approach 1:
A supporting assembly with rolling members (wheels) is introduced as an intermediary between the flexible tubes and the underlying platform. The rolling members contact the platform and support the tubes, converting sliding friction into rolling friction. This mediator structure prevents direct contact between the tubes and platform, significantly reducing wear on the tubes while maintaining their liquid transport function.
2Productivity
If flexible tubes move back and forth on the platform during operation, then liquid supply function is achieved, but frequent replacement is required due to wear
Solution Approach 1:
The supporting assembly with rolling members serves as a mediator that enables continuous tube movement without direct platform contact. By reducing friction wear through rolling contact, the tubes can move back and forth repeatedly during operation without degrading, eliminating the need for frequent replacements and maintaining high operational efficiency.
Solution Approach 2:
The patent replaces the direct sliding mechanical contact between tubes and platform with a rolling contact system. The rolling members convert the sliding friction mechanism into a rolling friction mechanism, which is significantly more efficient and causes minimal wear, allowing continuous operation without tube replacement.
3Reliability
If flexible tubes are equipped in immersion exposure apparatus, then liquid transport function is achieved, but replacement costs increase due to inevitable wear
Solution Approach 1:
The supporting assembly with rolling members acts as a protective intermediary that prevents direct friction between tubes and platform. This mediator structure preserves tube integrity during movement, extending tube lifespan and eliminating replacement costs while maintaining reliable liquid supply function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The supporting assembly effectively prevents tube wear by minimizing friction during movement, enhancing their longevity and reducing operational costs associated with frequent replacements.
Implementation Method 1
the tubes are able to be received by the parallel recesses and therefore to be supported by the supporting assembly. In this way, friction between the tubes and an underlying platform can be avoided.
Data Source
AI summary
A method for fabricating a pattern on a semiconductor substrate, comprising the steps of: (a) providing the semiconductor substrate having a photosensitive layer thereon; (b) transmitting the semiconductor substrate to an exposure apparatus including several tubes; (c) providing the supporting assembly to support the tubes, where the supporting assembly includes a first supporting rod having several first parallel recesses, a second supporting rod disposed opposite to the first supporting rod, a bridging member connected to one end of the first supporting rod or one end of the second supporting rod; and a rolling member received by the bridging member; (d) providing a photomask to the exposure apparatus; and (e) transferring the pattern from the photomask to the photosensitive layer.