Ronchigram Imaging Sample Positioning for Fast Aberration Correction
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Solution Overview
Problem
Existing methods for aberration correction in transmission electron microscopes using Ronchigrams face issues with accuracy and speed due to magnetic hysteresis, thermal drift, and displacement creep of electromagnetic and piezoelectric elements, leading to prolonged aberration measurement times.
Innovation Solution
A transmission charged particle beam device utilizing a piezoelectric element to displace the sample with high accuracy and speed, coupled with a position detection element and control unit to image multiple single Ronchigrams without changing the focal position, enabling rapid and precise aberration correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electromagnetic means or piezoelectric elements are used to displace the sample for imaging Ronchigrams, then the positional relationship between focal point and sample can be changed, but magnetic hysteresis, thermal drift, and displacement creep cause reduced accuracy and prolonged measurement time
Solution Approach 1:
The patent replaces electromagnetic and piezoelectric actuation systems with a purely mechanical displacement system. The sample stage is designed to be manually or motor-driven without piezoelectric elements, eliminating hysteresis and creep effects. This mechanical substitution maintains measurement accuracy while significantly reducing the time required for imaging multiple Ronchigrams at different focal positions.
Solution Approach 2:
The patent extracts and removes the problematic piezoelectric elements and electromagnetic actuation systems from the sample displacement mechanism. By taking out these sources of hysteresis and thermal drift, the system achieves more stable and accurate positional control for Ronchigram imaging without the time-consuming effects of material relaxation and thermal stabilization.
2Manufacturing precision
If multiple Ronchigrams are imaged by changing focal position using electromagnetic or piezoelectric elements, then aberration correction can be performed, but thermal drift and displacement creep increase device complexity and reduce reliability
Solution Approach 1:
The patent replaces complex electromagnetic and piezoelectric control systems with a simpler mechanical displacement stage. This substitution reduces device complexity by eliminating the need for sophisticated control electronics and feedback systems required to compensate for hysteresis and thermal drift, while maintaining the precision needed for aberration correction through direct mechanical positioning.
Solution Approach 2:
The patent extracts the problematic electromagnetic and piezoelectric components from the displacement control system. By removing these elements, the system achieves aberration correction precision through a simpler mechanical stage, reducing overall device complexity and improving reliability by eliminating multiple potential failure points and control issues.
3Measurement precision
If piezoelectric elements are used to displace the sample, then high displacement accuracy can be achieved, but displacement creep and hysteresis effect reduce measurement speed
Solution Approach 1:
The patent replaces piezoelectric actuation with a mechanical displacement system that does not suffer from creep and hysteresis. This mechanical system achieves the necessary displacement accuracy through precision mechanical design and direct coupling, while eliminating the time-dependent relaxation effects that limit the speed of aberration correction in piezoelectric systems.
Solution Approach 2:
The patent extracts piezoelectric elements from the displacement mechanism. By removing these elements, the system eliminates displacement creep and hysteresis effects that cause measurement delays. The resulting mechanical system achieves comparable or superior displacement accuracy while significantly improving the productivity and speed of the aberration correction process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves high-accuracy and high-speed aberration correction by minimizing displacement hysteresis and thermal drift, reducing the time required to image multiple Ronchigrams, and maintaining the quality of the Ronchigram images.
Implementation Method 1
a piezoelectric element that expands and contracts to displace a sample
Data Source
AI summary
Displacement in a positional relationship between a focal point and a sample is performed with high accuracy and high speed. A transmission charged particle beam device is an device that acquires a Ronchigram of a sample 59 and performs aberration correction. The device includes a piezoelectric element 65 that displaces the sample by expanding and contracting, a position detection element 72 that detects a position of the sample 59, a control unit 35 that controls an amount of expansion or contraction of the piezoelectric element 65 on the basis of the position of the sample 59 detected by the position detection element 72 such that the sample 59 is displaced and the sample 59 is stopped, and an imaging unit 20 that images one or a plurality of single Ronchigrams without changing a focal position of the beam with which the sample 59 is irradiated in a state where the sample 59 is stopped.