Roomside replaceable fan filter unit
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Solution Overview
Problem
Current roomside replaceable filter units in cleanrooms require large quantities of aerosol for testing, which is wasteful and disrupts normal operations, as well as unnecessarily loads adjacent filters, reducing their lifespan.
Innovation Solution
A roomside replaceable fan filter unit with an integrated aerosol injector positioned upstream of the fan module, allowing for efficient and uniform aerosol distribution directly to the filter, reducing the amount of aerosol needed and enabling individual filter testing without affecting adjacent units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a common plenum feeds multiple roomside filter units and aerosol is introduced into the plenum for testing, then a uniform aerosol concentration can be achieved across the plenum, but large quantities of aerosol are wasted and adjacent filters are unnecessarily loaded
Solution Approach 1:
The invention introduces a localized aerosol injection system at each filter unit rather than using a common plenum for all units. Each filter unit has its own aerosol injector that introduces aerosol directly into the airflow path of that specific filter, segmenting the aerosol distribution system to eliminate waste and prevent cross-contamination between adjacent filters.
Solution Approach 2:
The invention uses the fan module's airflow as an intermediary to transport aerosol directly to the filter being tested. The aerosol injector introduces aerosol into the airflow generated by the fan module, which then carries the aerosol uniformly across the filter surface, eliminating the need for a large common plenum and reducing overall aerosol consumption.
2Quantity of substance
If large quantities of aerosol are introduced into the plenum to achieve uniform concentration, then sufficient aerosol is available for testing, but the testing process takes a long time to charge and stabilize the aerosol concentration
Solution Approach 1:
The invention performs preliminary aerosol introduction directly at the filter unit before testing begins. The aerosol injector is positioned to introduce aerosol directly into the airflow path of the filter being tested, pre-charging the local airflow with aerosol so that testing can begin immediately without waiting for plenum-wide stabilization.
Solution Approach 2:
The invention extracts the aerosol introduction function from the common plenum system and places it directly at each individual filter unit. This extraction allows each filter to be tested independently with its own localized aerosol supply, eliminating the time required to stabilize aerosol concentration across the entire plenum.
3Reliability
If aerosol is introduced into a common plenum to test one filter, then the filter can be tested, but adjacent filters are unnecessarily loaded which reduces their lifespan
Solution Approach 1:
The invention segments the aerosol testing system so that each filter unit has its own dedicated aerosol injector and airflow path. This segmentation ensures that aerosol introduced for testing one filter does not affect adjacent filters, allowing reliable testing while preserving the lifespan of neighboring filters by preventing unnecessary aerosol exposure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces aerosol usage, ensures uniform aerosol distribution for accurate testing, and minimizes the impact on operational availability and filter lifespan by allowing individual filter testing without affecting adjacent units.
Implementation Method 1
an aerosol injector coupled to the housing and disposed upstream of an air moving blade of the fan module
Implementation Method 2
a fan module coupled to the housing and including an air moving blade disposed between the aerosol injector and the filter receiving aperture
Data Source
Figure 1
Figure 2~3
Figure 4~5
AI summary
Embodiments described herein relate to roomside replaceable fan filter units. In one embodiment, a roomside replaceable fan filter unit includes a housing having a filter receiving aperture and an air inlet, an aerosol injector, and a fan filter unit. The fan filter unit is coupled to the housing between the aerosol injector and the filter receiving aperture. In another embodiment, a roomside replaceable fan filter unit includes a housing having a sidewalls and a top wall that define an interior volume, an air inlet formed in the top wall, and a filter receiving aperture disposed opposite the top wall. The roomside replaceable fan filter unit also includes a fan filter unit disposed in the interior volume between the air inlet and the filter receiving aperture. The roomside replaceable fan filter unit includes an aerosol injector disposed upstream of the fan filter unit in the interior volume.