Rotary Cathode Magnet Segmentation for Uniform Erosion
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Solution Overview
Problem
Conventional rotary cathode units in magnetron sputtering apparatuses suffer from non-uniform target erosion, leading to reduced target utilization efficiency due to localized high electron density at corner portions, resulting in increased erosion at the ends and decreased efficiency.
Innovation Solution
The rotary cathode unit features a magnet unit with independently movable parts to adjust the magnetic field intensity, allowing for uniform target erosion by weakening the magnetic field at corner portions and adjusting it along the target length, ensuring consistent erosion and improved target utilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the magnet unit is integrally moved toward and away from the target, then the magnetic field intensity can be adjusted, but the local erosion at both end portions of the target cannot be restrained
Solution Approach 1:
The magnet unit is divided into a first magnet unit and a second magnet unit that can be independently moved toward and away from the target. This segmentation allows separate control of magnetic field intensity at different regions of the target, enabling restraint of local erosion at end portions while maintaining overall magnetic field adjustment capability.
Solution Approach 2:
The first and second magnet units can be independently positioned to create different magnetic field intensities at different locations along the target. This local quality adjustment enables specific regions (end portions) to have weakened magnetic fields to reduce erosion, while other regions maintain appropriate field strength for plasma generation.
2Manufacturing precision
If the magnetic field intensity is weakened at corner portions by changing magnet arrangement, then local erosion at end portions is restrained, but erosion changes at portions positioned from end portions toward the inside
Solution Approach 1:
The first and second magnet units are designed to be movable toward and away from the target, providing dynamic control of magnetic field intensity. This allows real-time adjustment of field strength at different target regions to achieve uniform erosion patterns while maintaining ease of operation through controlled movement mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables uniform target erosion and enhanced target utilization, allowing for reproducible thin film formation on the substrate with improved in-plane film thickness distribution.
Implementation Method 1
a magnet unit which generates a magnetic field leaking from a target surface so that a line passing through a position in which a vertical component of the magnetic field becomes zero extends along a generating line of the target
Implementation Method 2
coolant circulation means for circulating a coolant through the inner space of the target
Implementation Method 3
In case the target is sputtered while rotating the target by using the above-mentioned rotary cathode unit, plasma will be generated along the race-track shaped line
Data Source
AI summary
A magnet unit Mu is disposed inside a target of a cylindrical shape and generates a magnetic field that leaks from a surface of the target such that a line passing through a position in which a vertical component of the magnetic field becomes zero extends along a generating line of the target so as to close like a racetrack shape. The magnet unit is constituted into separate parts of: a first part which respectively forms a corner portion of the racetrack shape at both ends, in the direction of the generating line, of the target; a second part which is respectively disposed on the inside, as seen in the direction of the generating line, of the target, adjacent to the first part; and a third part which is positioned between the second parts.