Rotary Electrode EUV Source Reducing Discharge Circuit Inductance
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Solution Overview
Problem
Existing gas discharge-based extreme ultraviolet radiation sources face challenges in reducing the inductance of the discharge circuit, leading to increased recharging time and parasitic discharges due to high background pressure, which affects energy dissipation and plasma generation efficiency.
Innovation Solution
A high-voltage power supply with a capacitor battery arranged in a ring configuration concentric to the axis of rotation, along with electrical connections guided along a ring, reduces self-inductance and allows faster electrode charging, utilizing saturable inductances for magnetic pulse compression to shorten the recharging time and employing a rotary electrode arrangement with coaxial contact elements immersed in molten metal baths for low-inductance current supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the inductance of the discharge circuit is reduced to shorten recharging time, then the recharging time decreases, but parasitic discharges occur due to avalanche ionization at high gas pressure
Solution Approach 1:
The patent employs dynamic control of the discharge circuit by using a switchable inductance element that can be activated or deactivated based on operational requirements. This dynamic adjustment allows the system to optimize between fast recharging (low inductance) and parasitic discharge prevention (high inductance), resolving the contradiction between speed and reliability
Solution Approach 2:
The patent changes the electrical parameter (inductance) of the discharge circuit to resolve the contradiction. By adjusting the inductance value through the switchable element, the system can operate in different modes: low inductance for rapid recharging and high inductance for suppressing parasitic discharges, thus adapting to different operational demands
2Power
If gas pressure is increased to improve radiation emission, then radiation output increases, but background pressure increases causing avalanche ionization and parasitic discharges
Solution Approach 1:
The patent introduces an intermediary element - the switchable inductance - that mediates between the beneficial effect of high gas pressure (enhanced radiation emission) and the harmful effect (parasitic discharges). This intermediary allows the system to harness the advantages of high pressure while mitigating its detrimental effects through controlled inductance adjustment
3Loss of time
If capacitor size is reduced to decrease inductance, then inductance decreases and recharging speeds up, but stored energy becomes insufficient for adequate plasma generation
Solution Approach 1:
The patent segments the energy storage and delivery function by separating the capacitor bank from the discharge circuit inductance control. This allows independent optimization: large capacitors can store sufficient energy while a separate switchable inductance element controls the recharging speed, resolving the contradiction between energy capacity and recharging time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables faster energy transfer to the electrodes, reducing recharging time by over a factor of 10, allowing higher gas pressure operation and improved plasma generation efficiency while minimizing parasitic discharges, thus enhancing the generation of extreme ultraviolet radiation.
Implementation Method 1
a high-voltage power supply connected to the electrodes for generating high-voltage pulses
Implementation Method 2
a discharge area for a gas discharge for forming a plasma that emits the radiation
Implementation Method 3
forming a plasma that emits the radiation
Implementation Method 4
coaxial contact elements immersed in molten metal baths for low-inductance current supply
Implementation Method 5
reduces the self-inductance and allows for faster electrode charging
Data Source
AI summary
The object of the invention in an arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge is to reduce the time required for charging the electrodes by reducing the inductance of the discharge circuit. A high-voltage power supply connected to the electrodes which are constructed as disk electrodes and are rotatably mounted has a capacitor battery comprising capacitor elements which are arranged along a ring concentric to the axis of rotation of the electrodes with a ring plane directed parallel to the disk surface. Electrical connections are guided to the disk surfaces from the capacitor elements along a ring concentric to the axis of rotation.